About: Mechanical properties of plasma-polymerized tetravinylsilane films

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Continuous stiffness measurement (CSM) and dynamic contact module (DCM) nanoindentation measurements were used to characterize the mechanical properties of plasma-polymerized tetravinylsilane films deposited by PECVD at RF powers ranging from 10 to 70 W. The Youngs modulus and hardness as a function of the indenter displacement (5-500 nm) were investigated for films of 1-micron thickness. The Youngs modulus (hardness) was observed to increase from 8.3 GPa (0.9 GPa) to 58 GPa (9.5 GPa) with enhanced RF power. Nanoindentation analysis together with AFM imaging revealed a grain character of films deposited at a higher power. Finite element analysis was used to simulate nanoindentation measurements and evaluate properties of the elastic-plastic material. Continuous stiffness measurement (CSM) and dynamic contact module (DCM) nanoindentation measurements were used to characterize the mechanical properties of plasma-polymerized tetravinylsilane films deposited by PECVD at RF powers ranging from 10 to 70 W. The Youngs modulus and hardness as a function of the indenter displacement (5-500 nm) were investigated for films of 1-micron thickness. The Youngs modulus (hardness) was observed to increase from 8.3 GPa (0.9 GPa) to 58 GPa (9.5 GPa) with enhanced RF power. Nanoindentation analysis together with AFM imaging revealed a grain character of films deposited at a higher power. Finite element analysis was used to simulate nanoindentation measurements and evaluate properties of the elastic-plastic material. (en)
Title	Mechanical properties of plasma-polymerized tetravinylsilane films Mechanical properties of plasma-polymerized tetravinylsilane films (en)
skos:prefLabel	Mechanical properties of plasma-polymerized tetravinylsilane films Mechanical properties of plasma-polymerized tetravinylsilane films (en)
skos:notation	RIV/00216305:26310/11:PU96898!RIV13-AV0-26310___
http://linked.open...avai/predkladatel	Fakulta chemická
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(KAN101120701), P(ME09061)
http://linked.open...iv/cisloPeriodika	2
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Čech, Vladimír Lasota, Tomáš
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta chemická
http://linked.open...dnocenehoVysledku	211251
http://linked.open...ai/riv/idVysledku	RIV/00216305:26310/11:PU96898
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	mechanical properties, nanoindentation, organosilicon precursors, plasma-enhanced chemical vapor deposition (PECVD), thin films (en)
http://linked.open.../riv/klicoveSlovo	mechanical properties nanoindentation thin films organosilicon precursors plasma-enhanced chemical vapor deposition (PECVD)
http://linked.open...odStatuVydavatele	DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV	[FA1ACD4B0B4E]
http://linked.open...i/riv/nazevZdroje	Plasma Processes and Polymers
http://linked.open...in/vavai/riv/obor	CF
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Nanocomposite films and nanoparticles prepared in low pressure plasma for surface modifications Developoment of functional interlayers for polymer composites with controlled interphase
http://linked.open...UplatneniVysledku	2011
http://linked.open...v/svazekPeriodika	8
http://linked.open...iv/tvurceVysledku	Lasota, Tomáš Čech, Vladimír Drzal, Lawrence
issn	1612-8850
number of pages	9 (xsd:int)
http://localhost/t...ganizacniJednotka	26310
is http://linked.open...avai/riv/vysledek of	Mechanical properties of plasma-polymerized tetravinylsilane films

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