About: Single layer and multilayered films of plasma polymers analyzed by nanoindentation and spectroscopic ellipsometry

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Well-defined single layer and multilayered a-SiC:H films, deposited from tetravinylsilane at different powers by plasma-enhanced chemical vapor deposition on silicon, were intensively studied by in situ spectroscopic ellipsometry, nanoindentation, and atomic force microscopy. A realistic model of the sample structure was used to analyze ellipsometric data and distinguish individual layers in the multilayered film, evaluate their thickness and optical constants. Dispersion dependences for the refractive index were well separated for each type of individual layer, if the thickness was decreased 315 - 25 nm, and corresponded to those of the single layer. A beveled section of the multilayered film revealed the individual layers that were investigated by atomic force microscopy and nanoindentation to confirm that mechanical properties in multilayered and single layer films are similar. Well-defined single layer and multilayered a-SiC:H films, deposited from tetravinylsilane at different powers by plasma-enhanced chemical vapor deposition on silicon, were intensively studied by in situ spectroscopic ellipsometry, nanoindentation, and atomic force microscopy. A realistic model of the sample structure was used to analyze ellipsometric data and distinguish individual layers in the multilayered film, evaluate their thickness and optical constants. Dispersion dependences for the refractive index were well separated for each type of individual layer, if the thickness was decreased 315 - 25 nm, and corresponded to those of the single layer. A beveled section of the multilayered film revealed the individual layers that were investigated by atomic force microscopy and nanoindentation to confirm that mechanical properties in multilayered and single layer films are similar. (en)
Title	Single layer and multilayered films of plasma polymers analyzed by nanoindentation and spectroscopic ellipsometry Single layer and multilayered films of plasma polymers analyzed by nanoindentation and spectroscopic ellipsometry (en)
skos:prefLabel	Single layer and multilayered films of plasma polymers analyzed by nanoindentation and spectroscopic ellipsometry Single layer and multilayered films of plasma polymers analyzed by nanoindentation and spectroscopic ellipsometry (en)
skos:notation	RIV/00216305:26310/09:PU84416!RIV10-MSM-26310___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA104/06/0437), P(KAN101120701), Z(MSM0021630501)
http://linked.open...iv/cisloPeriodika	21
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Čechalová, Božena Čech, Vladimír Studýnka, Jan Trivedi, Rutul Rajendra
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta chemická
http://linked.open...dnocenehoVysledku	341416
http://linked.open...ai/riv/idVysledku	RIV/00216305:26310/09:PU84416
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Multilayers, Plasma processing and deposition, Ellipsometry, Atomic force microscopy (AFM) (en)
http://linked.open.../riv/klicoveSlovo	Atomic force microscopy (AFM) Plasma processing and deposition Ellipsometry Multilayers
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[E7EAE9914ADD]
http://linked.open...i/riv/nazevZdroje	Thin Solid Films
http://linked.open...in/vavai/riv/obor	CF
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Nanocomposite films and nanoparticles prepared in low pressure plasma for surface modifications Progress in plasmachemical processes for the development of smart polymer nanostructures
http://linked.open...UplatneniVysledku	2009
http://linked.open...v/svazekPeriodika	517
http://linked.open...iv/tvurceVysledku	Studýnka, Jan Čech, Vladimír Trivedi, Rutul Rajendra Čechalová, Božena
http://linked.open...n/vavai/riv/zamer	Multifunkční heterogenní materiály na bázi syntetických polymerů a biopolymerů
issn	0040-6090
number of pages	4 (xsd:int)
http://localhost/t...ganizacniJednotka	26310
is http://linked.open...avai/riv/vysledek of	Single layer and multilayered films of plasma polymers analyzed by nanoindentation and spectroscopic ellipsometry Single layer and multilayered films of plasma polymers analyzed by nanoindentation and spectroscopic ellipsometry Single layer and multilayered films of plasma polymers analyzed by nanoindentation and spectroscopic ellipsometry Single layer and multilayered films of plasma polymers analyzed by nanoindentation and spectroscopic ellipsometry

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