About: Correlation between mechanical, optical and chemical properties of thin films deposited by PECVD

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Plasma-polymerized films of vinyltriethoxysilane were prepared by plasma-enhanced chemical vapor deposition using an RF (13.56 MHz) helical coupling plasma system operated in a pulsed regime. Thin films deposited under the same deposition conditions but with different thicknesses (9.5 nm - 10.5 micron) were analyzed with respect to mechanical, optical, and chemical properties. All the films exhibited a layered structure. The overlayer at the film surface with a thickness (0.9 - 34 nm) dependent on the sample thickness was revealed by AFM, nanoindentation, and ellipsometry. A gradient behavior of the refractive index and the Young's modulus within the overlayer was related to the surface morphology of the films. A gradient interlayer at the substrate was also discussed. Plasma-polymerized films of vinyltriethoxysilane were prepared by plasma-enhanced chemical vapor deposition using an RF (13.56 MHz) helical coupling plasma system operated in a pulsed regime. Thin films deposited under the same deposition conditions but with different thicknesses (9.5 nm - 10.5 micron) were analyzed with respect to mechanical, optical, and chemical properties. All the films exhibited a layered structure. The overlayer at the film surface with a thickness (0.9 - 34 nm) dependent on the sample thickness was revealed by AFM, nanoindentation, and ellipsometry. A gradient behavior of the refractive index and the Young's modulus within the overlayer was related to the surface morphology of the films. A gradient interlayer at the substrate was also discussed. (en)
Title	Correlation between mechanical, optical and chemical properties of thin films deposited by PECVD Correlation between mechanical, optical and chemical properties of thin films deposited by PECVD (en)
skos:prefLabel	Correlation between mechanical, optical and chemical properties of thin films deposited by PECVD Correlation between mechanical, optical and chemical properties of thin films deposited by PECVD (en)
skos:notation	RIV/00216305:26310/08:PU77699!RIV10-MSM-26310___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(1P05OC087), P(GA104/06/0437), P(KAN101120701)
http://linked.open...iv/cisloPeriodika	22
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Čechalová, Božena Čech, Vladimír Studýnka, Jan Mistrík, Jan
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta chemická
http://linked.open...dnocenehoVysledku	361384
http://linked.open...ai/riv/idVysledku	RIV/00216305:26310/08:PU77699
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Ellipsometry, Fourier transform infrared spectroscopy, Photoelectron spectroscopy, [C] PACVD, [X] Plasma polymerization (en)
http://linked.open.../riv/klicoveSlovo	Photoelectron spectroscopy Ellipsometry Fourier transform infrared spectroscopy [C] PACVD [X] Plasma polymerization
http://linked.open...odStatuVydavatele	CZ - Česká republika
http://linked.open...ontrolniKodProRIV	[013136B2E3F4]
http://linked.open...i/riv/nazevZdroje	Surface and Coatings Technology
http://linked.open...in/vavai/riv/obor	CF
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Structuring of plasma polymers Nanocomposite films and nanoparticles prepared in low pressure plasma for surface modifications Progress in plasmachemical processes for the development of smart polymer nanostructures
http://linked.open...UplatneniVysledku	2008
http://linked.open...v/svazekPeriodika	202
http://linked.open...iv/tvurceVysledku	Studýnka, Jan Čech, Vladimír Zemek, Josef Mistrík, Jan Čechalová, Božena
issn	0257-8972
number of pages	4 (xsd:int)
http://localhost/t...ganizacniJednotka	26310
is http://linked.open...avai/riv/vysledek of	Correlation between mechanical, optical and chemical properties of thin films deposited by PECVD Correlation between mechanical, optical and chemical properties of thin films deposited by PECVD Correlation between mechanical, optical and chemical properties of thin films deposited by PECVD Correlation between mechanical, optical and chemical properties of thin films deposited by PECVD

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