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Description
  • Plasma-polymerized a-SiOC:H films were deposited from a mixture of tetravinylsilane vapor and oxygen gas at different power (0.1-10 W) and oxygen-to-total flow rate ratio (0-0.79). The Young's modulus, hardness, refractive index, extinction coefficient, and band gap of the plasma polymer were found to be controlled by the ratio between the content of carbon and oxygen atoms in films.
  • Plasma-polymerized a-SiOC:H films were deposited from a mixture of tetravinylsilane vapor and oxygen gas at different power (0.1-10 W) and oxygen-to-total flow rate ratio (0-0.79). The Young's modulus, hardness, refractive index, extinction coefficient, and band gap of the plasma polymer were found to be controlled by the ratio between the content of carbon and oxygen atoms in films. (en)
  • Fyzikální vs. chemické vlastnosti a-SiOC:H vrstev (cs)
Title
  • Physical versus chemical properties of plasma-polymerized a-SiOC:H films
  • Physical versus chemical properties of plasma-polymerized a-SiOC:H films (en)
  • Fyzikální vs. chemické vlastnosti a-SiOC:H vrstev (cs)
skos:prefLabel
  • Physical versus chemical properties of plasma-polymerized a-SiOC:H films
  • Physical versus chemical properties of plasma-polymerized a-SiOC:H films (en)
  • Fyzikální vs. chemické vlastnosti a-SiOC:H vrstev (cs)
skos:notation
  • RIV/00216305:26310/07:PU70627!RIV08-GA0-26310___
http://linked.open.../vavai/riv/strany
  • 1-4
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(1P05OC087), P(GA104/06/0437), P(KAN101120701), Z(MSM0021630501)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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  • 441326
http://linked.open...ai/riv/idVysledku
  • RIV/00216305:26310/07:PU70627
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • thin film, mechanical properties, optical properties, chemical properties (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [B0288349088D]
http://linked.open...v/mistoKonaniAkce
  • Kjoto
http://linked.open...i/riv/mistoVydani
  • Neuveden
http://linked.open...i/riv/nazevZdroje
  • 18th International Symposium on Plasma Chemistry
http://linked.open...in/vavai/riv/obor
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http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Studýnka, Jan
  • Čech, Vladimír
  • Peřina, Vratislav
  • Zemek, Josef
  • Čechalová, Božena
  • Jones, Frank
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Neuveden
https://schema.org/isbn
  • 978-4-9903773-2-8
http://localhost/t...ganizacniJednotka
  • 26310
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