About: Deposition of Single Plasma-Polymerized Vinyltriethoxysilane Films and their Layered Structure     Goto   Sponge   NotDistinct   Permalink

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Description
  • Analýza mechanických vlastností tenkých vrstev plazmových polymerů odhalila gradientní a vrstevnatý charakter filmů. (cs)
  • Plasma polymer films of vinyltriethoxysilane were prepared at the same deposition conditions but different film thicknesses and analyzed with respect to deposition rate, surface morphology and selected mechanical properties. The mean deposition rate decreased from 190 to 105 nm min-1 and the RMS roughness increased from 0.1 to 17.5 nm with film thickness ranging from 15.8 nm to 8.4 _m. The RMS roughness correlated to film thickness and the roughening coefficient was 0.92. Depth profiles of the elastic modulus and hardness revealed the gradient character of the films with thickness of up to 0.5 _m and a layered structure of a thicker film. Results enabled the reconstruction of a thicker film (> 0.5 _m) as the layered structure, which consists of a gradient interlayer at the substrate, a relatively homogeneous layer as the bulk, and gradient overlayer at the film surface.
  • Plasma polymer films of vinyltriethoxysilane were prepared at the same deposition conditions but different film thicknesses and analyzed with respect to deposition rate, surface morphology and selected mechanical properties. The mean deposition rate decreased from 190 to 105 nm min-1 and the RMS roughness increased from 0.1 to 17.5 nm with film thickness ranging from 15.8 nm to 8.4 _m. The RMS roughness correlated to film thickness and the roughening coefficient was 0.92. Depth profiles of the elastic modulus and hardness revealed the gradient character of the films with thickness of up to 0.5 _m and a layered structure of a thicker film. Results enabled the reconstruction of a thicker film (> 0.5 _m) as the layered structure, which consists of a gradient interlayer at the substrate, a relatively homogeneous layer as the bulk, and gradient overlayer at the film surface. (en)
Title
  • Deposition of Single Plasma-Polymerized Vinyltriethoxysilane Films and their Layered Structure
  • Depozice plazmových polymerů a jejich vrstevnatá struktura (cs)
  • Deposition of Single Plasma-Polymerized Vinyltriethoxysilane Films and their Layered Structure (en)
skos:prefLabel
  • Deposition of Single Plasma-Polymerized Vinyltriethoxysilane Films and their Layered Structure
  • Depozice plazmových polymerů a jejich vrstevnatá struktura (cs)
  • Deposition of Single Plasma-Polymerized Vinyltriethoxysilane Films and their Layered Structure (en)
skos:notation
  • RIV/00216305:26310/06:PU63486!RIV07-MSM-26310___
http://linked.open.../vavai/riv/strany
  • 8440-8444
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(1P05OC087), P(GA104/06/0437)
http://linked.open...iv/cisloPeriodika
  • 10B
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 470812
http://linked.open...ai/riv/idVysledku
  • RIV/00216305:26310/06:PU63486
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • PE CVD, vinyltriethoxysilane, a-SiOC:H, nanoindentation, continuous stiffness measurement, AFM, RMS roughness, Young's modulus, hardness (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • JP - Japonsko
http://linked.open...ontrolniKodProRIV
  • [3FE5B5896AC6]
http://linked.open...i/riv/nazevZdroje
  • Japanese Journal of Applied Physics
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 45
http://linked.open...iv/tvurceVysledku
  • Vaněk, Jan
  • Čech, Vladimír
  • Drzal, Lawrence
issn
  • 0021-4922
number of pages
http://localhost/t...ganizacniJednotka
  • 26310
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