About: Plasma polymerisation of methylphenylsilane

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Microwave electron cyclotron resonance plasma afterglow chemical vapour deposition (MW ECR PA CVD) and radio frequency plasma enhanced CVD (RF PE CVD) of plasma-poly(methylphenylsilane) (p-PMPS) were examined according to plasma composition and resultingthin film properties. Direct mass spectrometry monitoring and gas chromatography and mass spectroscopy (GC MS) of cold-trapped plasma products were used. Deposited samples were measured mainly on luminescence. The low pressure MW ECR plasma creates spec cies for layer growth by a smaller average number of inelastic collisions per origin of monomer molecule. The exploitation of monomer reaches 23% in comparison with RF plasma and the deposition rate is larger in comparison with RF plasma . The inelasticcollision rate is primarily more important for growing layers than the power introduced into plasma. The luminescence spectra of both MW and RF samples are compared. Microwave electron cyclotron resonance plasma afterglow chemical vapour deposition (MW ECR PA CVD) and radio frequency plasma enhanced CVD (RF PE CVD) of plasma-poly(methylphenylsilane) (p-PMPS) were examined according to plasma composition and resultingthin film properties. Direct mass spectrometry monitoring and gas chromatography and mass spectroscopy (GC MS) of cold-trapped plasma products were used. Deposited samples were measured mainly on luminescence. The low pressure MW ECR plasma creates spec cies for layer growth by a smaller average number of inelastic collisions per origin of monomer molecule. The exploitation of monomer reaches 23% in comparison with RF plasma and the deposition rate is larger in comparison with RF plasma . The inelasticcollision rate is primarily more important for growing layers than the power introduced into plasma. The luminescence spectra of both MW and RF samples are compared. (en) Předmětem publikace je plazmatická polymerace metylfenylsilánu v radifrekvenčním a mikrovlném výboji (cs)
Title	Plasma polymerisation of methylphenylsilane Plasma polymerisation of methylphenylsilane (en) Plazmatická polymerace metylfenylsilánu (cs)
skos:prefLabel	Plasma polymerisation of methylphenylsilane Plasma polymerisation of methylphenylsilane (en) Plazmatická polymerace metylfenylsilánu (cs)
skos:notation	RIV/00216305:26310/05:PU52971!RIV06-MSM-26310___
http://linked.open.../vavai/riv/strany	486-489
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(1P05ME734), P(GP203/03/D133), Z(MSM0021630501), Z(MSM7088352101)
http://linked.open...iv/cisloPeriodika	1-4
http://linked.open...vai/riv/dodaniDat	2006
http://linked.open...aciTvurceVysledku	Pryček, Jiří Weiter, Martin Kuřitka, Ivo Salyk, Ota Herrmann, Radim Broža, Pavel Dokoupil, Norbert
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta chemická
http://linked.open...dnocenehoVysledku	536181
http://linked.open...ai/riv/idVysledku	RIV/00216305:26310/05:PU52971
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Polysilane; PMPS; Plasma deposition; Mass spectroscopy (en)
http://linked.open.../riv/klicoveSlovo	Plasma deposition Polysilane Mass spectroscopy PMPS
http://linked.open...odStatuVydavatele	CZ - Česká republika
http://linked.open...ontrolniKodProRIV	[B9997018EB2E]
http://linked.open...i/riv/nazevZdroje	Surface and Coatings Technology
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	7 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...vavai/riv/projekt	modification and study of dimensionality of nanostructure - based materials Light controled molecular current switch
http://linked.open...UplatneniVysledku	2005
http://linked.open...v/svazekPeriodika	200
http://linked.open...iv/tvurceVysledku	Kuřitka, Ivo Salyk, Ota Weiter, Martin Broža, Pavel Pryček, Jiří Dokoupil, Norbert Herrmann, Radim
http://linked.open...n/vavai/riv/zamer	Multifunkční heterogenní materiály na bázi syntetických polymerů a biopolymerů Multifunctional Composite Systems Based on Natural and Synthetic Polymers
issn	0257-8972
number of pages	4 (xsd:int)
http://localhost/t...ganizacniJednotka	26310
is http://linked.open...avai/riv/vysledek of	Plasma polymerisation of methylphenylsilane

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