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| Description
| - Our work deals with the identification of the intensive spectral lines and bands measured during the plasma deposition using the hexamethyldisiloxane (HMDSO) and the tetravinylsilane (TVS) as monomer. The deposition processes were carried out in a continual regime as well as in a pulsed regime with the varied relative pulse duration. At first, the pure monomers were used. Furthermore, tetravinylsilane was mixed in various ratios with oxygen, the CH4 + H2 gas mixture was added to hexamethyldisiloxane. WWe observed a lot of changes in intensity and character of spectra with increasing pulse duration, with increasing oxygen flow rate. Oxygen has an important role for the creation of various fragments and cyclic oligomers. In the next part of experiment,exhaust gas was investigated by gas-chromatography and mass spectrometry (GC-MS). Oligomers with complex structure were identified.
- Our work deals with the identification of the intensive spectral lines and bands measured during the plasma deposition using the hexamethyldisiloxane (HMDSO) and the tetravinylsilane (TVS) as monomer. The deposition processes were carried out in a continual regime as well as in a pulsed regime with the varied relative pulse duration. At first, the pure monomers were used. Furthermore, tetravinylsilane was mixed in various ratios with oxygen, the CH4 + H2 gas mixture was added to hexamethyldisiloxane. WWe observed a lot of changes in intensity and character of spectra with increasing pulse duration, with increasing oxygen flow rate. Oxygen has an important role for the creation of various fragments and cyclic oligomers. In the next part of experiment,exhaust gas was investigated by gas-chromatography and mass spectrometry (GC-MS). Oligomers with complex structure were identified. (en)
- Práce podává přehled o spektrálních atomárních čarách a molekulových pásech identifikovaných v emisních spektrech během depozice vrstev založených na silanech. Jako monomery byly použity hexamethyldisiloxane (HMDSO) a tetravinylsilane (TVS). Depozice probíhala v kontinuálním i pulsním režimu s proměnlivou délkou pulsu. Kromě čistých monomerů byly použity k depozici i jejich směsi s kyslíkem a směs CH4 + H2. Byly pozorovány výrazné změny ve spektrech jak vlivem složení reakční směsi, tak i dalších depozzičních podmínek. Kyslík hraje významnou roli při vzniku různých fragmentů a cyklických oligomerů. Poslední experimenty byly zaměřeny na studium složení plazmatu pomocí GC-MS. (cs)
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| Title
| - Diagnostika plazmatu během depozice tenkých vrstev založených na silanu (cs)
- Plasma Diagnostic During Deposition Processes of Silane Based Thin Films
- Plasma Diagnostic During Deposition Processes of Silane Based Thin Films (en)
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| skos:prefLabel
| - Diagnostika plazmatu během depozice tenkých vrstev založených na silanu (cs)
- Plasma Diagnostic During Deposition Processes of Silane Based Thin Films
- Plasma Diagnostic During Deposition Processes of Silane Based Thin Films (en)
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| skos:notation
| - RIV/00216305:26310/04:PU46602!RIV/2005/GA0/263105/N
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| http://linked.open.../vavai/riv/strany
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| http://linked.open...avai/riv/aktivita
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| http://linked.open...avai/riv/aktivity
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| http://linked.open...iv/cisloPeriodika
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| http://linked.open...vai/riv/dodaniDat
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| http://linked.open...aciTvurceVysledku
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| http://linked.open.../riv/druhVysledku
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| http://linked.open...iv/duvernostUdaju
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| http://linked.open...titaPredkladatele
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| http://linked.open...dnocenehoVysledku
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| http://linked.open...ai/riv/idVysledku
| - RIV/00216305:26310/04:PU46602
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| http://linked.open...riv/jazykVysledku
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| http://linked.open.../riv/klicovaSlova
| - optical spectrum, tetravinylsilane, effective power (en)
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| http://linked.open.../riv/klicoveSlovo
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| http://linked.open...odStatuVydavatele
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| http://linked.open...ontrolniKodProRIV
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| http://linked.open...i/riv/nazevZdroje
| - Czechoslovak Journal of Physics
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| http://linked.open...in/vavai/riv/obor
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| http://linked.open...ichTvurcuVysledku
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| http://linked.open...cetTvurcuVysledku
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| http://linked.open...vavai/riv/projekt
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| http://linked.open...UplatneniVysledku
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| http://linked.open...v/svazekPeriodika
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| http://linked.open...iv/tvurceVysledku
| - Krčma, František
- Vaněk, Jan
- Rašková, Zuzana
- Brandejs, Kamil
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| issn
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| number of pages
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| http://localhost/t...ganizacniJednotka
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