About: AFM imaging and fractal analysis of surface roughness of AlN epilayers on sapphire substrates

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About: AFM imaging and fractal analysis of surface roughness of AlN epilayers on sapphire substrates Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The paper deals with AFM imaging and characterization of 3D surface morphology of aluminum nitride (AlN) epilayers on sapphire substrates prepared by magnetron sputtering. Due to the effect of temperature changes on epilayer's surface during the fabrication, a surface morphology is studied by combination of atomic force microscopy (AFM) and fractal analysis methods. Both methods are useful tools that may assist manufacturers in developing and fabricating AlN thin films with optimal surface characteristics. Furthermore, they provide different yet complementary information to that offered by traditional surface statistical parameters. This combination is used for the first time for measurement on AlN epilayers on sapphire substrates, and provides the overall 3D morphology of the sample surfaces (by AFM imaging), and reveals fractal characteristics in the surface morphology (fractal analysis). The paper deals with AFM imaging and characterization of 3D surface morphology of aluminum nitride (AlN) epilayers on sapphire substrates prepared by magnetron sputtering. Due to the effect of temperature changes on epilayer's surface during the fabrication, a surface morphology is studied by combination of atomic force microscopy (AFM) and fractal analysis methods. Both methods are useful tools that may assist manufacturers in developing and fabricating AlN thin films with optimal surface characteristics. Furthermore, they provide different yet complementary information to that offered by traditional surface statistical parameters. This combination is used for the first time for measurement on AlN epilayers on sapphire substrates, and provides the overall 3D morphology of the sample surfaces (by AFM imaging), and reveals fractal characteristics in the surface morphology (fractal analysis). (en)
Title	AFM imaging and fractal analysis of surface roughness of AlN epilayers on sapphire substrates AFM imaging and fractal analysis of surface roughness of AlN epilayers on sapphire substrates (en)
skos:prefLabel	AFM imaging and fractal analysis of surface roughness of AlN epilayers on sapphire substrates AFM imaging and fractal analysis of surface roughness of AlN epilayers on sapphire substrates (en)
skos:notation	RIV/00216305:26220/14:PU109929!RIV15-MSM-26220___
http://linked.open...avai/riv/aktivita	P S
http://linked.open...avai/riv/aktivity	P(ED1.1.00/02.0068), P(ED2.1.00/03.0072), S
http://linked.open...iv/cisloPeriodika	312
http://linked.open...vai/riv/dodaniDat	2015
http://linked.open...aciTvurceVysledku	Škarvada, Pavel Tománek, Pavel Grmela, Lubomír Dallaeva, Dinara
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta elektrotechniky a komunikačních technologií
http://linked.open...dnocenehoVysledku	1807
http://linked.open...ai/riv/idVysledku	RIV/00216305:26220/14:PU109929
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Aluminum nitride, Epitaxy, Substrate, Surface roughness, Atomic force microscopy, Fractal analysis (en)
http://linked.open.../riv/klicoveSlovo	Epitaxy Atomic force microscopy Substrate Surface roughness Aluminum nitride Fractal analysis
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[4B1FB359C45D]
http://linked.open...i/riv/nazevZdroje	Applied Surface Science
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Central european institute of technology Centre of sensor, information and communication systems
http://linked.open...UplatneniVysledku	2014
http://linked.open...v/svazekPeriodika	312
http://linked.open...iv/tvurceVysledku	Grmela, Lubomír Tománek, Pavel Škarvada, Pavel Dallaeva, Dinara Stach, Sebastian Talu, Stefan
issn	0169-4332
number of pages	6 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.apsusc.2014.05.086
http://localhost/t...ganizacniJednotka	26220

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