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  • This article deals with usage of low-temperature co-fired ceramic as a material for hermetic package of bare-dies. Two types of substrates are measured – Heraeus HeraLock2000 and DuPont GreenTape 951PT. For more accurate results, different arrays of vias are designed to imitate conductive joints in a package. An air-tightness of samples is determined based on Oxygen Transmission Rate measurement. Dependence of the air-tightness on a material thickness and on a count of vias was investigated. Design and fabrication of the samples and measurement description is also included. Results of this experiment compare mentioned types of ceramics and create a base of knowledge for design of an air-tight package.
  • This article deals with usage of low-temperature co-fired ceramic as a material for hermetic package of bare-dies. Two types of substrates are measured – Heraeus HeraLock2000 and DuPont GreenTape 951PT. For more accurate results, different arrays of vias are designed to imitate conductive joints in a package. An air-tightness of samples is determined based on Oxygen Transmission Rate measurement. Dependence of the air-tightness on a material thickness and on a count of vias was investigated. Design and fabrication of the samples and measurement description is also included. Results of this experiment compare mentioned types of ceramics and create a base of knowledge for design of an air-tight package. (en)
Title
  • Usage of Low-Temperature Co-Fired Ceramic In Hermetic Packaging
  • Usage of Low-Temperature Co-Fired Ceramic In Hermetic Packaging (en)
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  • Usage of Low-Temperature Co-Fired Ceramic In Hermetic Packaging
  • Usage of Low-Temperature Co-Fired Ceramic In Hermetic Packaging (en)
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  • RIV/00216305:26220/14:PU109466!RIV15-MSM-26220___
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  • RIV/00216305:26220/14:PU109466
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  • LTCC, hermetic packaging, OTR (en)
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  • [0C666CE9EC3B]
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  • Szendiuch, Ivan
  • Procházka, Michal
  • Klíma, Martin
  • Blahová, Lucie
  • Somer, Jakub
http://localhost/t...ganizacniJednotka
  • 26220
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