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  • AlN films were deposited by magnetron sputtering on the sapphire substrates. The dependence of films morphology on the substrate temperature is defined. The film is represented by well textured areas for higher substrate temperature during deposition process. Adhesion strength of particles and substrate depends on temperature. Increasing of temperature by heating the substrate is important parameter which intences the interaction in interface at the near-surface area.
  • AlN films were deposited by magnetron sputtering on the sapphire substrates. The dependence of films morphology on the substrate temperature is defined. The film is represented by well textured areas for higher substrate temperature during deposition process. Adhesion strength of particles and substrate depends on temperature. Increasing of temperature by heating the substrate is important parameter which intences the interaction in interface at the near-surface area. (en)
Title
  • Surface roughness of aluminum nitride epilayers prepared by magnetron sputtering
  • Surface roughness of aluminum nitride epilayers prepared by magnetron sputtering (en)
skos:prefLabel
  • Surface roughness of aluminum nitride epilayers prepared by magnetron sputtering
  • Surface roughness of aluminum nitride epilayers prepared by magnetron sputtering (en)
skos:notation
  • RIV/00216305:26220/14:PU108877!RIV15-MSM-26220___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(ED1.1.00/02.0068), P(ED2.1.00/03.0072)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
  • Dallaeva, Dinara
http://linked.open.../riv/druhVysledku
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  • 48658
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  • RIV/00216305:26220/14:PU108877
http://linked.open...riv/jazykVysledku
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  • substrate, target, thin film, surface, roughness, atomic force microscopy (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [C11ADE8890B0]
http://linked.open...v/mistoKonaniAkce
  • Brno
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  • Brno
http://linked.open...i/riv/nazevZdroje
  • Proceedings of the 20th conference. Volume 3
http://linked.open...in/vavai/riv/obor
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http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
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http://linked.open...iv/tvurceVysledku
  • Dallaeva, Dinara
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
number of pages
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  • LITERA Brno
https://schema.org/isbn
  • 978-80-214-4922-0
http://localhost/t...ganizacniJednotka
  • 26220
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