About: Comparison of the Intrinsic Characteristics of LTCC and Silicon Pressure Sensors by Means of 1/f Noise Measurements

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About: Comparison of the Intrinsic Characteristics of LTCC and Silicon Pressure Sensors by Means of 1/f Noise Measurements Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	A pressure sensor with high resolution is of key importance for precise measurements in the low-pressure range. The intrinsic resolution of piezoresistive ceramic pressure sensors (CPSs) mainly depends on their functional sensitivity and the electronic noise in the thick-film resistors. Both the sensitivity and the noise level depend on the material and the structural properties, and the dimensions of the sensing structure. In general, the sensitivity can be increased and the noise can be reduced by using additional electronics for the signal processing, but this makes the sensor bigger, more complex and more expensive. In this study we discuss the technological limits for downscaling the sensors pressure range without any processing of the sensors signal. The intrinsic resolution of the piezoresistive pressure sensors designed for the pressure range 0 to 100 mbar and realised in LTCC (Low Temperature Cofired Ceramic) technology was evaluated and compared to the resolution of a commercial 100-mbar sil A pressure sensor with high resolution is of key importance for precise measurements in the low-pressure range. The intrinsic resolution of piezoresistive ceramic pressure sensors (CPSs) mainly depends on their functional sensitivity and the electronic noise in the thick-film resistors. Both the sensitivity and the noise level depend on the material and the structural properties, and the dimensions of the sensing structure. In general, the sensitivity can be increased and the noise can be reduced by using additional electronics for the signal processing, but this makes the sensor bigger, more complex and more expensive. In this study we discuss the technological limits for downscaling the sensors pressure range without any processing of the sensors signal. The intrinsic resolution of the piezoresistive pressure sensors designed for the pressure range 0 to 100 mbar and realised in LTCC (Low Temperature Cofired Ceramic) technology was evaluated and compared to the resolution of a commercial 100-mbar sil (en)
Title	Comparison of the Intrinsic Characteristics of LTCC and Silicon Pressure Sensors by Means of 1/f Noise Measurements Comparison of the Intrinsic Characteristics of LTCC and Silicon Pressure Sensors by Means of 1/f Noise Measurements (en)
skos:prefLabel	Comparison of the Intrinsic Characteristics of LTCC and Silicon Pressure Sensors by Means of 1/f Noise Measurements Comparison of the Intrinsic Characteristics of LTCC and Silicon Pressure Sensors by Means of 1/f Noise Measurements (en)
skos:notation	RIV/00216305:26220/13:PU105429!RIV14-MSM-26220___
http://linked.open...avai/predkladatel	Fakulta elektrotechniky a komunikačních technologií
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(ED2.1.00/03.0072), P(MEB091129)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2014
http://linked.open...aciTvurceVysledku	Majzner, Jiří Sedlák, Petr Sedláková, Vlasta Šikula, Josef Kopecký, Martin
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta elektrotechniky a komunikačních technologií
http://linked.open...dnocenehoVysledku	66337
http://linked.open...ai/riv/idVysledku	RIV/00216305:26220/13:PU105429
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	LTCC pressure sensor, intrinsic resolution, noise spectral density (en)
http://linked.open.../riv/klicoveSlovo	LTCC pressure sensor intrinsic resolution noise spectral density
http://linked.open...odStatuVydavatele	CZ - Česká republika
http://linked.open...ontrolniKodProRIV	[2D18857BAC75]
http://linked.open...i/riv/nazevZdroje	Radioengineering
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...vavai/riv/projekt	Centre of sensor, information and communication systems Investigation of the noise of thick-film pressure sensors
http://linked.open...UplatneniVysledku	2013
http://linked.open...v/svazekPeriodika	22
http://linked.open...iv/tvurceVysledku	Kopecký, Martin Majzner, Jiří Sedlák, Petr Sedláková, Vlasta Šikula, Josef Belavic, Darko Santo-Zarnik, Marina
issn	1210-2512
number of pages	6 (xsd:int)
http://localhost/t...ganizacniJednotka	26220

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