About: MEMS-microhotplate-based hydrogen gas sensor utilizing the nanostructured porous-anodic-alumina-supported WO3 active layer

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About: MEMS-microhotplate-based hydrogen gas sensor utilizing the nanostructured porous-anodic-alumina-supported WO3 active layer Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Practical microsensors for fast, highly sensitive hydrogen gas detection were fabricated by combining silicon integral technology for MEMS microhotplate platform with newly developed technological, electrical, and electrolytic conditions for forming nanostructured porous-anodic-alumina-templated WO3 layer as the sensing material. The morphology-structure-property relationship for the nanostructured sensing layer was determined by scanning electron microscopy, X-ray diffraction, and through systematically investigating the sensor performance at various H2 concentrations (5-1000 ppm) and operating temperatures (20-350oC). The sensors showed superior sensitivity to hydrogen gas, with the lowest detection limit ever reported for WO3 semiconductors (5 ppm), the fast response and recovery times (2-3 min), and the best sensitivity at 150oC, which was 100 times higher than that of a reference sensor having a smooth WO3 active film. The technology developed enables high-volume, low-cost, and low-power sensor-o Practical microsensors for fast, highly sensitive hydrogen gas detection were fabricated by combining silicon integral technology for MEMS microhotplate platform with newly developed technological, electrical, and electrolytic conditions for forming nanostructured porous-anodic-alumina-templated WO3 layer as the sensing material. The morphology-structure-property relationship for the nanostructured sensing layer was determined by scanning electron microscopy, X-ray diffraction, and through systematically investigating the sensor performance at various H2 concentrations (5-1000 ppm) and operating temperatures (20-350oC). The sensors showed superior sensitivity to hydrogen gas, with the lowest detection limit ever reported for WO3 semiconductors (5 ppm), the fast response and recovery times (2-3 min), and the best sensitivity at 150oC, which was 100 times higher than that of a reference sensor having a smooth WO3 active film. The technology developed enables high-volume, low-cost, and low-power sensor-o (en)
Title	MEMS-microhotplate-based hydrogen gas sensor utilizing the nanostructured porous-anodic-alumina-supported WO3 active layer MEMS-microhotplate-based hydrogen gas sensor utilizing the nanostructured porous-anodic-alumina-supported WO3 active layer (en)
skos:prefLabel	MEMS-microhotplate-based hydrogen gas sensor utilizing the nanostructured porous-anodic-alumina-supported WO3 active layer MEMS-microhotplate-based hydrogen gas sensor utilizing the nanostructured porous-anodic-alumina-supported WO3 active layer (en)
skos:notation	RIV/00216305:26220/13:PU104544!RIV14-MSM-26220___
http://linked.open...avai/predkladatel	Fakulta elektrotechniky a komunikačních technologií
http://linked.open...avai/riv/aktivita	R
http://linked.open...avai/riv/aktivity	R
http://linked.open...iv/cisloPeriodika	-
http://linked.open...vai/riv/dodaniDat	2014
http://linked.open...aciTvurceVysledku	Hubálek, Jaromír Mozalev, Alexander
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta elektrotechniky a komunikačních technologií
http://linked.open...dnocenehoVysledku	87188
http://linked.open...ai/riv/idVysledku	RIV/00216305:26220/13:PU104544
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	hydrogen detection, gas sensor, microhotplate, porous anodic alumina, tungsten trioxide (en)
http://linked.open.../riv/klicoveSlovo	hydrogen detection tungsten trioxide gas sensor porous anodic alumina microhotplate
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[311529D78E9C]
http://linked.open...i/riv/nazevZdroje	INTERNATIONAL JOURNAL OF HYDROGEN ENERGY
http://linked.open...in/vavai/riv/obor	JB
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	10 (xsd:int)
http://linked.open...UplatneniVysledku	2013
http://linked.open...v/svazekPeriodika	38
http://linked.open...iv/tvurceVysledku	Hubálek, Jaromír Mozalev, Alexander Calavia, Raul Gispert-Guirado, Francesc Llobet, Eduard Vazquez, Rosa Maria Correig, Xavier Vilanova, Xavier Cané, Carles Grácia, Isabel
issn	0360-3199
number of pages	11 (xsd:int)
http://localhost/t...ganizacniJednotka	26220

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