About: Design and Fabrication of MEMS Low Power Heating Membrane

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The aim of this work is design and fabrication of micro hotplates. This type of device is often used for gassensing applications. The main goal is to produce the structure of the heating membrane using different fabrication process. Only wet etching process is used. Mainly two types of membranes are discussed – suspended and close type of the membrane. The sample which is going to be produced will be a membrane with the size of 1x1 mm, to ensure a suitable fabrication technology and the applicable design of the micro hotplate. The micro hotplates power consumption has to be up to 100 mW at the operating temperature 480 degrees C. The aim of this work is design and fabrication of micro hotplates. This type of device is often used for gassensing applications. The main goal is to produce the structure of the heating membrane using different fabrication process. Only wet etching process is used. Mainly two types of membranes are discussed – suspended and close type of the membrane. The sample which is going to be produced will be a membrane with the size of 1x1 mm, to ensure a suitable fabrication technology and the applicable design of the micro hotplate. The micro hotplates power consumption has to be up to 100 mW at the operating temperature 480 degrees C. (en)
Title	Design and Fabrication of MEMS Low Power Heating Membrane Design and Fabrication of MEMS Low Power Heating Membrane (en)
skos:prefLabel	Design and Fabrication of MEMS Low Power Heating Membrane Design and Fabrication of MEMS Low Power Heating Membrane (en)
skos:notation	RIV/00216305:26220/12:PU101360!RIV13-GA0-26220___
http://linked.open...avai/predkladatel	Fakulta elektrotechniky a komunikačních technologií
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(ED2.1.00/03.0072), P(GA102/08/1546)
http://linked.open...iv/cisloPeriodika	VI
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Chomoucká, Jana Pekárek, Jan Hubálek, Jaromír Svatoš, Vojtěch Márik, Marian
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta elektrotechniky a komunikačních technologií
http://linked.open...dnocenehoVysledku	130248
http://linked.open...ai/riv/idVysledku	RIV/00216305:26220/12:PU101360
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	MEMS (microelectromechanical system), micro-hotplate, power consumption, micromachining. (en)
http://linked.open.../riv/klicoveSlovo	power consumption MEMS (microelectromechanical system) micro-hotplate micromachining.
http://linked.open...odStatuVydavatele	CZ - Česká republika
http://linked.open...ontrolniKodProRIV	[025FF33D8D91]
http://linked.open...i/riv/nazevZdroje	ElectroScope - http://www.electroscope.zcu.cz
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Centre of sensor, information and communication systems Miniaturized intelligent systems and nanostructured elektrodes for chemical, biological, and pharmaceutical applications (NANIMEL)
http://linked.open...UplatneniVysledku	2012
http://linked.open...v/svazekPeriodika	2012
http://linked.open...iv/tvurceVysledku	Chomoucká, Jana Hubálek, Jaromír Pekárek, Jan Márik, Marian Svatoš, Vojtěch
issn	1802-4564
number of pages	3 (xsd:int)
http://localhost/t...ganizacniJednotka	26220
is http://linked.open...avai/riv/vysledek of	Design and Fabrication of MEMS Low Power Heating Membrane

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