About: INTRINSIC RESOLUTION OF A PIEZORESISTIVE CERAMIC PRESSURE SENSOR

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	A high resolution of a pressure sensor is of key importance for precise measurements in the low pressure range. The intrinsic resolution of the piezoresistive ceramic pressure sensors (CPSs) depends on its functional sensitivity and the electronic noise in the thick-film resistors. The sensitivity and the noise level depend on the material and structural properties, and the dimensions of the sensing structure. For an optimized sensor design the noise measured at its output can be reduced by using additional electronics for signal processing which results in incensement of the sensor complexity and the final cost. In this work we discuss the technological limits for downscaling the sensors pressure range without any processing of the sensors signal. The intrinsic resolution of the piezoresistive LTCC pressure sensors, designed for the pressure range 0 to 100 mbar was evaluated and compared to the resolution of the commercial 100-mbar silicon pressure sensor. A high resolution of a pressure sensor is of key importance for precise measurements in the low pressure range. The intrinsic resolution of the piezoresistive ceramic pressure sensors (CPSs) depends on its functional sensitivity and the electronic noise in the thick-film resistors. The sensitivity and the noise level depend on the material and structural properties, and the dimensions of the sensing structure. For an optimized sensor design the noise measured at its output can be reduced by using additional electronics for signal processing which results in incensement of the sensor complexity and the final cost. In this work we discuss the technological limits for downscaling the sensors pressure range without any processing of the sensors signal. The intrinsic resolution of the piezoresistive LTCC pressure sensors, designed for the pressure range 0 to 100 mbar was evaluated and compared to the resolution of the commercial 100-mbar silicon pressure sensor. (en)
Title	INTRINSIC RESOLUTION OF A PIEZORESISTIVE CERAMIC PRESSURE SENSOR INTRINSIC RESOLUTION OF A PIEZORESISTIVE CERAMIC PRESSURE SENSOR (en)
skos:prefLabel	INTRINSIC RESOLUTION OF A PIEZORESISTIVE CERAMIC PRESSURE SENSOR INTRINSIC RESOLUTION OF A PIEZORESISTIVE CERAMIC PRESSURE SENSOR (en)
skos:notation	RIV/00216305:26220/12:PU101137!RIV14-MSM-26220___
http://linked.open...avai/predkladatel	Fakulta elektrotechniky a komunikačních technologií
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(MEB091129)
http://linked.open...vai/riv/dodaniDat	2014
http://linked.open...aciTvurceVysledku	Majzner, Jiří Sedlák, Petr Sedláková, Vlasta Šikula, Josef Kopecký, Martin
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta elektrotechniky a komunikačních technologií
http://linked.open...dnocenehoVysledku	142776
http://linked.open...ai/riv/idVysledku	RIV/00216305:26220/12:PU101137
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	LTCC pressure sensor, intrinsic resolution, noise spectral density (en)
http://linked.open.../riv/klicoveSlovo	LTCC pressure sensor intrinsic resolution noise spectral density
http://linked.open...ontrolniKodProRIV	[3DFC06DCE24E]
http://linked.open...v/mistoKonaniAkce	Brno
http://linked.open...i/riv/mistoVydani	Neuveden
http://linked.open...i/riv/nazevZdroje	EDS 2012 Proceedings
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...vavai/riv/projekt	Investigation of the noise of thick-film pressure sensors
http://linked.open...UplatneniVysledku	2012
http://linked.open...iv/tvurceVysledku	Kopecký, Martin Majzner, Jiří Sedlák, Petr Sedláková, Vlasta Šikula, Josef Santo-Zarnik, Marina Belavič, Darko
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2012-06-28 (xsd:date)
number of pages	6 (xsd:int)
http://purl.org/ne...btex#hasPublisher	IMAPS CZ&SK
https://schema.org/isbn	978-80-214-4539-0
http://localhost/t...ganizacniJednotka	26220

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