About: Possible Applications of Freestanding Carbon Nanotubes in MEMS Technology

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Carbon nanotubes (CNTs) are molecular-scale tubes of graphitic carbon with outstanding properties. They are among the stiffest and strongest fibers known, and have remarkable electronic properties and many other unique characteristics. In our experiment, CNTs were synthesized using plasma enhanced chemical vapor deposition on the silicon wafer with patterned iron catalytic layer. If the catalyst is only located in certain areas (patterned), then nanotubes grow only in those areas. The arrays with freestanding carbon nanotubes were created. It is possible to apply this method of CNTs preparation in many areas, such as sensor-based applications. For example, thanks to the CNTs dimensions is possible to increase the surface in capacitance pressure sensors that are one of the most using in microelectronic devices for pressure sensing. The novel MEMS structure was designed to be utilized as capacitance pressure sensor. The most applicable topology of the MEMS structure was chosen by means of electrostatic Carbon nanotubes (CNTs) are molecular-scale tubes of graphitic carbon with outstanding properties. They are among the stiffest and strongest fibers known, and have remarkable electronic properties and many other unique characteristics. In our experiment, CNTs were synthesized using plasma enhanced chemical vapor deposition on the silicon wafer with patterned iron catalytic layer. If the catalyst is only located in certain areas (patterned), then nanotubes grow only in those areas. The arrays with freestanding carbon nanotubes were created. It is possible to apply this method of CNTs preparation in many areas, such as sensor-based applications. For example, thanks to the CNTs dimensions is possible to increase the surface in capacitance pressure sensors that are one of the most using in microelectronic devices for pressure sensing. The novel MEMS structure was designed to be utilized as capacitance pressure sensor. The most applicable topology of the MEMS structure was chosen by means of electrostatic (en)
Title	Possible Applications of Freestanding Carbon Nanotubes in MEMS Technology Possible Applications of Freestanding Carbon Nanotubes in MEMS Technology (en)
skos:prefLabel	Possible Applications of Freestanding Carbon Nanotubes in MEMS Technology Possible Applications of Freestanding Carbon Nanotubes in MEMS Technology (en)
skos:notation	RIV/00216305:26220/11:PU93801!RIV12-MSM-26220___
http://linked.open...avai/predkladatel	Fakulta elektrotechniky a komunikačních technologií
http://linked.open...avai/riv/aktivita	P S Z
http://linked.open...avai/riv/aktivity	P(2A-1TP1/143), P(GA102/09/1601), S, Z(MSM0021630503)
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Pekárek, Jan Magát, Martin Vrba, Radimír
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta elektrotechniky a komunikačních technologií
http://linked.open...dnocenehoVysledku	221806
http://linked.open...ai/riv/idVysledku	RIV/00216305:26220/11:PU93801
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Micro-Electro-Mechanical System (MEMS), capacitive sensor, carbon nanotubes (en)
http://linked.open.../riv/klicoveSlovo	capacitive sensor carbon nanotubes Micro-Electro-Mechanical System (MEMS)
http://linked.open...ontrolniKodProRIV	[B3CEBDCC8706]
http://linked.open...v/mistoKonaniAkce	Brno
http://linked.open...i/riv/mistoVydani	Ostrava
http://linked.open...i/riv/nazevZdroje	NANOCON 2011 - Conference Proceedings
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Intelligent micro and nano structures for microsensors realized with support of nanotechnology Research of novel mechatronic MEMS structures for pressure measurements
http://linked.open...UplatneniVysledku	2011
http://linked.open...iv/tvurceVysledku	Kulha, Pavel Magát, Martin Pekárek, Jan Vrba, Radimír
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2011-09-21 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Nové trendy v mikroelektronických systémech a nanotechnologiích (MIKROSYN)
number of pages	5 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Tanger s.r.o.
https://schema.org/isbn	978-80-87294-23-9
http://localhost/t...ganizacniJednotka	26220
is http://linked.open...avai/riv/vysledek of	Possible Applications of Freestanding Carbon Nanotubes in MEMS Technology Possible Applications of Freestanding Carbon Nanotubes in MEMS Technology

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