About: Design, modeling and fabrication of novel MEMS structure utilizing carbon nanotubes

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The paper deals with novel Micro-Electro-Mechanical System (MEMS) structure. The structure was designed to be utilized as capacitance pressure sensor. The most applicable topology of the MEMS structure was selected by means of electrostatic model analysis made by MatLAB software. There were proposed five structures and the best solution was selected as the chessboard structure, since it provides the suitable capacity for the sensor measurement range. The overall capacity and also sensitivity of the MEMS sensor was increased by means of carbon nanotubes (CNTs). Therefore the pressure measurement range increased as well. The comparison between conventional capacitance sensor structures and the presented proposal shown, that the improvement depends on the area and number of the growing fields. However this improvement is from tens to hundereds of percents. The article depicts the design process including simulations and analysis of the chosen structure too. The paper deals with novel Micro-Electro-Mechanical System (MEMS) structure. The structure was designed to be utilized as capacitance pressure sensor. The most applicable topology of the MEMS structure was selected by means of electrostatic model analysis made by MatLAB software. There were proposed five structures and the best solution was selected as the chessboard structure, since it provides the suitable capacity for the sensor measurement range. The overall capacity and also sensitivity of the MEMS sensor was increased by means of carbon nanotubes (CNTs). Therefore the pressure measurement range increased as well. The comparison between conventional capacitance sensor structures and the presented proposal shown, that the improvement depends on the area and number of the growing fields. However this improvement is from tens to hundereds of percents. The article depicts the design process including simulations and analysis of the chosen structure too. (en)
Title	Design, modeling and fabrication of novel MEMS structure utilizing carbon nanotubes Design, modeling and fabrication of novel MEMS structure utilizing carbon nanotubes (en)
skos:prefLabel	Design, modeling and fabrication of novel MEMS structure utilizing carbon nanotubes Design, modeling and fabrication of novel MEMS structure utilizing carbon nanotubes (en)
skos:notation	RIV/00216305:26220/11:PU93554!RIV12-MSM-26220___
http://linked.open...avai/predkladatel	Fakulta elektrotechniky a komunikačních technologií
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(2A-1TP1/143), P(GA102/09/1601), Z(MSM0021630503)
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Pavlík, Michal Háze, Jiří Pekárek, Jan Magát, Martin Vrba, Radimír
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta elektrotechniky a komunikačních technologií
http://linked.open...dnocenehoVysledku	193536
http://linked.open...ai/riv/idVysledku	RIV/00216305:26220/11:PU93554
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	MEMS, capacitive sensor, carbon nanotubes (en)
http://linked.open.../riv/klicoveSlovo	capacitive sensor carbon nanotubes MEMS
http://linked.open...ontrolniKodProRIV	[E936BDE8500D]
http://linked.open...v/mistoKonaniAkce	Brighton
http://linked.open...i/riv/mistoVydani	Brighton
http://linked.open...i/riv/nazevZdroje	Proceedings of 18th European microelectronics packaging conference EMPC 2011
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Intelligent micro and nano structures for microsensors realized with support of nanotechnology Research of novel mechatronic MEMS structures for pressure measurements
http://linked.open...UplatneniVysledku	2011
http://linked.open...iv/tvurceVysledku	Háze, Jiří Magát, Martin Pavlík, Michal Pekárek, Jan Vrba, Radimír
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2011-09-12 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Nové trendy v mikroelektronických systémech a nanotechnologiích (MIKROSYN)
number of pages	5 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Neuveden
https://schema.org/isbn	978-0-9568086-0-8
http://localhost/t...ganizacniJednotka	26220
is http://linked.open...avai/riv/vysledek of	Design, modeling and fabrication of novel MEMS structure utilizing carbon nanotubes Design, modeling and fabrication of novel MEMS structure utilizing carbon nanotubes

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