About: A novel hybrid integrated system for capacitive pressure MEMS sensors

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The paper deals with a novel hybrid integrated system for capacitive pressure MEMS sensors. This system should be splitted into the two parts. One is novel integrated capacity-to-current converter (C/I) and the second is auxiliary part made from standard SMD devices. The C/I converter was designed in CMOS process with technology AMIS 0,7 um. The second part consists of the sigma-delta converter, microcontroller, communication and data bus. The designed system profits from the previous works, where the capacity-to-digital output converter AD 7745 is the main part of the processing stage. This converter is substituted by the novel C/I converter. The C/I converter with digital calibration handled in microcontroller provide almost the same accuracy and linearity as the mentioned AD 7745 converter, but with less complexity of the whole circuitries. The paper deals with a novel hybrid integrated system for capacitive pressure MEMS sensors. This system should be splitted into the two parts. One is novel integrated capacity-to-current converter (C/I) and the second is auxiliary part made from standard SMD devices. The C/I converter was designed in CMOS process with technology AMIS 0,7 um. The second part consists of the sigma-delta converter, microcontroller, communication and data bus. The designed system profits from the previous works, where the capacity-to-digital output converter AD 7745 is the main part of the processing stage. This converter is substituted by the novel C/I converter. The C/I converter with digital calibration handled in microcontroller provide almost the same accuracy and linearity as the mentioned AD 7745 converter, but with less complexity of the whole circuitries. (en)
Title	A novel hybrid integrated system for capacitive pressure MEMS sensors A novel hybrid integrated system for capacitive pressure MEMS sensors (en)
skos:prefLabel	A novel hybrid integrated system for capacitive pressure MEMS sensors A novel hybrid integrated system for capacitive pressure MEMS sensors (en)
skos:notation	RIV/00216305:26220/09:PU83621!RIV11-MPO-26220___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(2A-1TP1/143), P(GA102/08/1116), Z(MSM0021630503)
http://linked.open...iv/cisloPeriodika	3
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Pavlík, Michal Háze, Jiří Vrba, Radimír
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta elektrotechniky a komunikačních technologií
http://linked.open...dnocenehoVysledku	301469
http://linked.open...ai/riv/idVysledku	RIV/00216305:26220/09:PU83621
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	MEMS sensor, data acquisition system (en)
http://linked.open.../riv/klicoveSlovo	data acquisition system MEMS sensor
http://linked.open...odStatuVydavatele	CZ - Česká republika
http://linked.open...ontrolniKodProRIV	[0EB7851ED432]
http://linked.open...i/riv/nazevZdroje	ElectroScope - http://www.electroscope.zcu.cz
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	3 (xsd:int)
http://linked.open...vavai/riv/projekt	Research of novel mechatronic MEMS structures for pressure measurements Methods of Signal Digitizing for Advanced Sensors
http://linked.open...UplatneniVysledku	2009
http://linked.open...v/svazekPeriodika	2009
http://linked.open...iv/tvurceVysledku	Háze, Jiří Pavlík, Michal Vrba, Radimír
http://linked.open...n/vavai/riv/zamer	Nové trendy v mikroelektronických systémech a nanotechnologiích (MIKROSYN)
issn	1802-4564
number of pages	4 (xsd:int)
http://localhost/t...ganizacniJednotka	26220
is http://linked.open...avai/riv/vysledek of	A novel hybrid integrated system for capacitive pressure MEMS sensors A novel hybrid integrated system for capacitive pressure MEMS sensors A novel hybrid integrated system for capacitive pressure MEMS sensors

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