About: Experimental study of MEMS capacitive sensor

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	This paper describes a new approach to pressure sensors development using capacitive principle. Novel pressure sensor has been achieved utilizing carbon nanotubes (CNTs) arrays as the surface increase element in capacitive sensor. This paper describes a new approach to pressure sensors development using capacitive principle. Novel pressure sensor has been achieved utilizing carbon nanotubes (CNTs) arrays as the surface increase element in capacitive sensor. (en)
Title	Experimental study of MEMS capacitive sensor Experimental study of MEMS capacitive sensor (en)
skos:prefLabel	Experimental study of MEMS capacitive sensor Experimental study of MEMS capacitive sensor (en)
skos:notation	RIV/00216305:26220/09:PU81787!RIV11-MPO-26220___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(2A-1TP1/143), Z(MSM0021630503)
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Ficek, Richard Pekárek, Jan Magát, Martin Vrba, Radimír
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta elektrotechniky a komunikačních technologií
http://linked.open...dnocenehoVysledku	314266
http://linked.open...ai/riv/idVysledku	RIV/00216305:26220/09:PU81787
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Pressure sensor, capacity, carbon nanotubes, plasma enhanced chemical vapor deposition (en)
http://linked.open.../riv/klicoveSlovo	capacity carbon nanotubes Pressure sensor plasma enhanced chemical vapor deposition
http://linked.open...ontrolniKodProRIV	[02B5BE08DD76]
http://linked.open...v/mistoKonaniAkce	Brno
http://linked.open...i/riv/mistoVydani	Brno
http://linked.open...i/riv/nazevZdroje	EDS'09 IMAPS CS International Conference Proceedings
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Research of novel mechatronic MEMS structures for pressure measurements
http://linked.open...UplatneniVysledku	2009
http://linked.open...iv/tvurceVysledku	Magát, Martin Pekárek, Jan Vrba, Radimír Ficek, Richard
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2009-09-02 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Nové trendy v mikroelektronických systémech a nanotechnologiích (MIKROSYN)
number of pages	5 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Vysoké učení technické v Brně
https://schema.org/isbn	978-80-214-3933-7
http://localhost/t...ganizacniJednotka	26220
is http://linked.open...avai/riv/vysledek of	Experimental study of MEMS capacitive sensor Experimental study of MEMS capacitive sensor Experimental study of MEMS capacitive sensor

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