About: Carbon nanotubes in pressure sensors

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	V tomto článku budeme popisovat výzkum a vývoj tlakových senzorů využívající uhlíkové nanotrubice. (cs) In this paper a new research and development of the pressure sensors utilizing carbon nanotubes (CNTs) arrays as the electron source in emission sensor or as the surface increase element in capacitance sensor are presented. Both sensors consisted of the two parts; elastic electrode-sensing film fabricated by wet anisotropic etching process and solid electrode. The emission sensor has elastic anode electrode with membrane and multi-wall carbon nanotubes (MWCNTs) arrays cathode in the vacuum chamber. The capacitance sensor has the same topology extensive by CNT on both electrodes without vacuum chamber. The MWCNTs were grown by plasma enhanced chemical vapour deposition (PECVD). In this paper a new research and development of the pressure sensors utilizing carbon nanotubes (CNTs) arrays as the electron source in emission sensor or as the surface increase element in capacitance sensor are presented. Both sensors consisted of the two parts; elastic electrode-sensing film fabricated by wet anisotropic etching process and solid electrode. The emission sensor has elastic anode electrode with membrane and multi-wall carbon nanotubes (MWCNTs) arrays cathode in the vacuum chamber. The capacitance sensor has the same topology extensive by CNT on both electrodes without vacuum chamber. The MWCNTs were grown by plasma enhanced chemical vapour deposition (PECVD). (en)
Title	Carbon nanotubes in pressure sensors Carbon nanotubes in pressure sensors (en) Uhlíkové nanotrubice v tlakových senzorech (cs)
skos:prefLabel	Carbon nanotubes in pressure sensors Carbon nanotubes in pressure sensors (en) Uhlíkové nanotrubice v tlakových senzorech (cs)
skos:notation	RIV/00216305:26220/07:PU70457!RIV08-GA0-26220___
http://linked.open.../vavai/riv/strany	178-182
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(2A-1TP1/143), P(GD102/03/H105), Z(MSM0021630503)
http://linked.open...vai/riv/dodaniDat	2008
http://linked.open...aciTvurceVysledku	Ficek, Richard Vrba, Radimír Eliáš, Marek
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta elektrotechniky a komunikačních technologií
http://linked.open...dnocenehoVysledku	412630
http://linked.open...ai/riv/idVysledku	RIV/00216305:26220/07:PU70457
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	carbon nanotubes, field emission, pressure sensor (en)
http://linked.open.../riv/klicoveSlovo	pressure sensor carbon nanotubes field emission
http://linked.open...ontrolniKodProRIV	[C0AB0B170FB1]
http://linked.open...v/mistoKonaniAkce	BRNO
http://linked.open...i/riv/mistoVydani	Brno
http://linked.open...i/riv/nazevZdroje	EDS 07 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDING
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Modern methods of electronic circuit analysis, design and applications Research of novel mechatronic MEMS structures for pressure measurements
http://linked.open...UplatneniVysledku	2007
http://linked.open...iv/tvurceVysledku	Eliáš, Marek Jašek, Ondřej Vrba, Radimír Zajíčková, Lenka Ficek, Richard
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2007-09-20 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Nové trendy v mikroelektronických systémech a nanotechnologiích (MIKROSYN)
number of pages	5 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Ing. Zdeněk Novotný CSc.
https://schema.org/isbn	978-80-214-3470-7
http://localhost/t...ganizacniJednotka	26220
is http://linked.open...avai/riv/vysledek of	Carbon nanotubes in pressure sensors Carbon nanotubes in pressure sensors Carbon nanotubes in pressure sensors

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