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  • Novel pressure sensors have been achieved utilizing carbon nanotubes (CNTs) arrays as the electron source in emission sensor or as the surface increase element in capacitance sensor. Both sensors consisted of the elastic electrode-sensing film fabricated by wet anisotropic etching process and solid electrode. The emission sensor has elastic anode electrode with membrane and multi-wall carbon nanotubes (MWCNTs) arrays cathode in the vacuum chamber. The capacitance sensor has the same topology extensive by CNT on both electrodes without vacuum chamber. The MWCNTs were grown by plasma enhanced chemical vapour deposition (PECVD).
  • Novel pressure sensors have been achieved utilizing carbon nanotubes (CNTs) arrays as the electron source in emission sensor or as the surface increase element in capacitance sensor. Both sensors consisted of the elastic electrode-sensing film fabricated by wet anisotropic etching process and solid electrode. The emission sensor has elastic anode electrode with membrane and multi-wall carbon nanotubes (MWCNTs) arrays cathode in the vacuum chamber. The capacitance sensor has the same topology extensive by CNT on both electrodes without vacuum chamber. The MWCNTs were grown by plasma enhanced chemical vapour deposition (PECVD). (en)
  • Nové druhy tlakové senzory využivající pole uhlíkových nanotrubic jako zdroj elektronů u emisního senzoru nebo element zvětšující povrch u kapacitního senzoru byly vyrobeny. (cs)
Title
  • Carbon Nanotubes Applicated in Pressure Measurement
  • Uhlíkové nanotrubice použivané při měření tlaku (cs)
  • Carbon Nanotubes Applicated in Pressure Measurement (en)
skos:prefLabel
  • Carbon Nanotubes Applicated in Pressure Measurement
  • Uhlíkové nanotrubice použivané při měření tlaku (cs)
  • Carbon Nanotubes Applicated in Pressure Measurement (en)
skos:notation
  • RIV/00216305:26220/07:PU68054!RIV08-MSM-26220___
http://linked.open.../vavai/riv/strany
  • 295-298
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(2A-1TP1/143), S, Z(MSM0021630503)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
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  • 412629
http://linked.open...ai/riv/idVysledku
  • RIV/00216305:26220/07:PU68054
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Carbon Nanotubes, Sensor, MEMS (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [91E2D2D477F5]
http://linked.open...v/mistoKonaniAkce
  • Brno
http://linked.open...i/riv/mistoVydani
  • Brno
http://linked.open...i/riv/nazevZdroje
  • Proceedings of the 13th Conference STUDENT EEICT 2007
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
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http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Vrba, Radimír
  • Ficek, Richard
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Vysoké učení technické v Brně. (Fakulta elektrotechniky a komunikačních technologií; Fakulta informačních technologií)
https://schema.org/isbn
  • 978-80-214-3410-3
http://localhost/t...ganizacniJednotka
  • 26220
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