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  • Současný vývoj v rastrovací elektronové mikroskopii je orientován na používání nízkého napětí urychlujícího svazek primárních elektronů (LV SEM). SE a BSE jsou hlavní složky detekovaného signálu v LV SEM. Zatímco SE mohou být detekovány ET nebo in-lens detektorem, detekce BSE v LV SEM je dosud nevyřešený problém. (cs)
  • Nowadays the development of the image formation in SEM is oriented to the use of scanning electron microscopes with low accelerating voltage of the primary beam (LV SEM). Secondary electrons and backscattered electrons (BSE) are the main components of detected signal in LV SEM. While secondary electrons can be detected either by ET or %22in lens%22 detector, the detection of BSE in LV SEM is an unsolved problem yet.
  • Nowadays the development of the image formation in SEM is oriented to the use of scanning electron microscopes with low accelerating voltage of the primary beam (LV SEM). Secondary electrons and backscattered electrons (BSE) are the main components of detected signal in LV SEM. While secondary electrons can be detected either by ET or %22in lens%22 detector, the detection of BSE in LV SEM is an unsolved problem yet. (en)
Title
  • Trajectories of Signal Electrons in Low-Voltage BSE Detector
  • Trajektorie signálních elektronů v nízkonapěťovém BSE detektoru (cs)
  • Trajectories of Signal Electrons in Low-Voltage BSE Detector (en)
skos:prefLabel
  • Trajectories of Signal Electrons in Low-Voltage BSE Detector
  • Trajektorie signálních elektronů v nízkonapěťovém BSE detektoru (cs)
  • Trajectories of Signal Electrons in Low-Voltage BSE Detector (en)
skos:notation
  • RIV/00216305:26220/04:PU44568!RIV/2005/AV0/262205/N
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  • low-voltage scanning electron microscopy, signal electrons trajectories, low-voltage BSE detector (en)
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  • Autrata, Rudolf
  • Wandrol, Petr
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  • 26220
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