About: Scanning near-field optical microscopy in semiconductor research

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Exploration of optical properties of materials and optical characterization of structure defects at the nanometer scale was impossible until recently due to the diffraction limit of light. With the invention of Scanning near-field optical microscopy (SNOM) the spatial resolution at the 50-100 nm level using visible or near infrared light is now possible.This review focuses on some applications of SNOM techniques of nondestructive, non-contact spectroscopic investigation of the structures.Throughout the review, weight is placed on how SNOM goes together with existing material characterization techniques, as well as how quantitative results can be obtained from SNOM measurements. Exploration of optical properties of materials and optical characterization of structure defects at the nanometer scale was impossible until recently due to the diffraction limit of light. With the invention of Scanning near-field optical microscopy (SNOM) the spatial resolution at the 50-100 nm level using visible or near infrared light is now possible.This review focuses on some applications of SNOM techniques of nondestructive, non-contact spectroscopic investigation of the structures.Throughout the review, weight is placed on how SNOM goes together with existing material characterization techniques, as well as how quantitative results can be obtained from SNOM measurements. (en)
Title	Scanning near-field optical microscopy in semiconductor research Scanning near-field optical microscopy in semiconductor research (en)
skos:prefLabel	Scanning near-field optical microscopy in semiconductor research Scanning near-field optical microscopy in semiconductor research (en)
skos:notation	RIV/00216305:26220/04:PU44150!RIV14-MSM-26220___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(ME 544), P(OC 523.40), Z(MSM 262200022)
http://linked.open...iv/cisloPeriodika	1/2
http://linked.open...vai/riv/dodaniDat	2014
http://linked.open...aciTvurceVysledku	Otevřelová, Dana Dobisová, Markéta Tománek, Pavel Dobis, Pavel
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta elektrotechniky a komunikačních technologií
http://linked.open...dnocenehoVysledku	585519
http://linked.open...ai/riv/idVysledku	RIV/00216305:26220/04:PU44150
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	near-field optics, scanning, microscopy, semiconductor, optical characterization, optical properties, (en)
http://linked.open.../riv/klicoveSlovo	near-field optics optical characterization microscopy optical properties semiconductor scanning
http://linked.open...odStatuVydavatele	RU - Ruská federace
http://linked.open...ontrolniKodProRIV	[20C160788BBD]
http://linked.open...i/riv/nazevZdroje	Physics of low-dimensional structures
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	http://linked.opendata.cz/resource/domain/vavai/projekt/OC%20523.40 http://linked.opendata.cz/resource/domain/vavai/projekt/ME%20544
http://linked.open...UplatneniVysledku	2004
http://linked.open...v/svazekPeriodika	2004
http://linked.open...iv/tvurceVysledku	Tománek, Pavel Dobis, Pavel Otevřelová, Dana Benešová, Markéta
http://linked.open...ain/vavai/riv/wos	000224052700007
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20262200022
issn	0204-3467
number of pages	7 (xsd:int)
http://localhost/t...ganizacniJednotka	26220

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