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Description
  • Sensitive pressure sensor with nitride membrane and optoelectronic read-out system is described. Measured pressure is transformed into thick layer nitride membrane deflection. Nitride membrane serves as a mirror for laser beam and can move reflected laser mark. Mark’s position is sensed using position sensing device – fotolateral diode. Diode double current signal is amplified and conditioned digitally by ADuC 812 microcomputer. This one chip microcomputer provides an IEEE 1451.2 interface.
  • Sensitive pressure sensor with nitride membrane and optoelectronic read-out system is described. Measured pressure is transformed into thick layer nitride membrane deflection. Nitride membrane serves as a mirror for laser beam and can move reflected laser mark. Mark’s position is sensed using position sensing device – fotolateral diode. Diode double current signal is amplified and conditioned digitally by ADuC 812 microcomputer. This one chip microcomputer provides an IEEE 1451.2 interface. (en)
Title
  • Pressure Sensor with Si3N4 Diaphragm and Optoelectronic Sensing
  • Pressure Sensor with Si3N4 Diaphragm and Optoelectronic Sensing (en)
skos:prefLabel
  • Pressure Sensor with Si3N4 Diaphragm and Optoelectronic Sensing
  • Pressure Sensor with Si3N4 Diaphragm and Optoelectronic Sensing (en)
skos:notation
  • RIV/00216305:26220/01:PU22969!RIV/2002/GA0/262202/N
http://linked.open.../vavai/riv/strany
  • 327-329
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA102/00/0938)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 692612
http://linked.open...ai/riv/idVysledku
  • RIV/00216305:26220/01:PU22969
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • pressure, nitride membrane, optoelectronic, standard IEEE 1451 (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [ACD5AAD46999]
http://linked.open...v/mistoKonaniAkce
  • Lisbon
http://linked.open...i/riv/mistoVydani
  • Lisbon, Portugal
http://linked.open...i/riv/nazevZdroje
  • TEMI 2001 trends in electrical Measurement and Instrumentation
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...ocetUcastnikuAkce
http://linked.open...nichUcastnikuAkce
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Beneš, Petr
  • Vrba, Radimír
  • Kolařík, Vladimír
  • Matějka, František
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
number of pages
http://purl.org/ne...btex#hasPublisher
  • Instituto de Telecomunicacoes
https://schema.org/isbn
  • 972-98115-4-7
http://localhost/t...ganizacniJednotka
  • 26220
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