About: Depth resolution enhancement by combined DSIMS and TOF-LEIS profiling

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	A combination of dynamic secondary ion mass spectroscopy (DSIMS) and time-of-flight low-energy ion scattering (TOF-LEIS) has been applied to acquire a composition depth profile of MoSi multilayers. During the sequential Ar+ sputtering secondary ions were monitored while in-between the sputtering cycles the TOF-LEIS spectra of scattered He neutrals were acquired. All the measured TOF-LEIS spectra versus sputtering time were displayed in one bitmap from which the depth profiles for different scattering depths were derived and analyzed. Analyzing the TOF-LEIS spectra of He particles scattered from the areas below the layer altered by ion-beam mixing led to an improvement of the depth resolution. In this way the resolution limits due to mixing phenomena can be overcome. Finally, the direct comparison of the DSIMS and TOF-LEIS depth profiles was carried out. A combination of dynamic secondary ion mass spectroscopy (DSIMS) and time-of-flight low-energy ion scattering (TOF-LEIS) has been applied to acquire a composition depth profile of MoSi multilayers. During the sequential Ar+ sputtering secondary ions were monitored while in-between the sputtering cycles the TOF-LEIS spectra of scattered He neutrals were acquired. All the measured TOF-LEIS spectra versus sputtering time were displayed in one bitmap from which the depth profiles for different scattering depths were derived and analyzed. Analyzing the TOF-LEIS spectra of He particles scattered from the areas below the layer altered by ion-beam mixing led to an improvement of the depth resolution. In this way the resolution limits due to mixing phenomena can be overcome. Finally, the direct comparison of the DSIMS and TOF-LEIS depth profiles was carried out. (en)
Title	Depth resolution enhancement by combined DSIMS and TOF-LEIS profiling Depth resolution enhancement by combined DSIMS and TOF-LEIS profiling (en)
skos:prefLabel	Depth resolution enhancement by combined DSIMS and TOF-LEIS profiling Depth resolution enhancement by combined DSIMS and TOF-LEIS profiling (en)
skos:notation	RIV/00216305:26210/11:PU90807!RIV11-GA0-26210___
http://linked.open...avai/predkladatel	Fakulta strojního inženýrství
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(2E08017), P(GEFON/06/E001), P(GP202/07/P486), P(KAN400100701), P(LC06040), Z(MSM0021630508)
http://linked.open...iv/cisloPeriodika	3
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Kolíbal, Miroslav Šikola, Tomáš Urbánek, Michal Duda, Radek Matlocha, Tomáš Čechal, Jan Bábor, Petr Průša, Stanislav
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta strojního inženýrství
http://linked.open...dnocenehoVysledku	193402
http://linked.open...ai/riv/idVysledku	RIV/00216305:26210/11:PU90807
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	DSIMS, TOF-LEIS, LEIS, Depth profiling, MoSi, HRTEM (en)
http://linked.open.../riv/klicoveSlovo	DSIMS Depth profiling HRTEM LEIS MoSi TOF-LEIS
http://linked.open...odStatuVydavatele	CZ - Česká republika
http://linked.open...ontrolniKodProRIV	[13EC7EDDB0DA]
http://linked.open...i/riv/nazevZdroje	Nuclear Instruments and Methods in Physics Research B
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	8 (xsd:int)
http://linked.open...cetTvurcuVysledku	8 (xsd:int)
http://linked.open...vavai/riv/projekt	Functional hybrid nanosystems of semiconductors and metals with organic materials (FUNS) Spin-dependent transport and electronic correlations in nanostructures Depth profiling of 2D nanostructures by SIMS, TOF-LEIS and XPS combined with ion beam sputtering Procedures and Methods to Increase Number of Researchers Structures for Nanophotonics and Nanoelectronics
http://linked.open...UplatneniVysledku	2011
http://linked.open...v/svazekPeriodika	269
http://linked.open...iv/tvurceVysledku	Kolíbal, Miroslav Šikola, Tomáš Bábor, Petr Duda, Radek Matlocha, Tomáš Průša, Stanislav Urbánek, Michal Čechal, Jan
http://linked.open...n/vavai/riv/zamer	Anorganické nanomateriály a nanostruktury: vytváření, analýza, vlastnosti
issn	0168-583X
number of pages	4 (xsd:int)
http://localhost/t...ganizacniJednotka	26210
is http://linked.open...avai/riv/vysledek of	Depth resolution enhancement by combined DSIMS and TOF-LEIS profiling

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