About: Selective growth of Co islands on ion beam induced nucleation centers in a native SiO2 film

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We present a straightforward method for fabrication of patterns of metallic nanostructures. The focused ion beam lithography (FIB) has been used to locally modify a native SiO2 layer on a silicon substrate. On the modified areas preferential nucleation of cobalt islands is observed. The cobalt islands formed upon deposition at 400 - 430 C combined with an intermediate annealing at 550 C have a uniform size distribution and their size can be controlled by the distance between the nucleation sites and the amount of deposited material. It is proposed that the island formation at patterned sites is due to reduced surface diffusion of Co atoms in the vicinity of FIB modified areas. The intermediate annealing improves the island morphology since the kinetic diffusion limits are lowered and system reconfigures towards its equilibrium state. We present a straightforward method for fabrication of patterns of metallic nanostructures. The focused ion beam lithography (FIB) has been used to locally modify a native SiO2 layer on a silicon substrate. On the modified areas preferential nucleation of cobalt islands is observed. The cobalt islands formed upon deposition at 400 - 430 C combined with an intermediate annealing at 550 C have a uniform size distribution and their size can be controlled by the distance between the nucleation sites and the amount of deposited material. It is proposed that the island formation at patterned sites is due to reduced surface diffusion of Co atoms in the vicinity of FIB modified areas. The intermediate annealing improves the island morphology since the kinetic diffusion limits are lowered and system reconfigures towards its equilibrium state. (en)
Title	Selective growth of Co islands on ion beam induced nucleation centers in a native SiO2 film Selective growth of Co islands on ion beam induced nucleation centers in a native SiO2 film (en)
skos:prefLabel	Selective growth of Co islands on ion beam induced nucleation centers in a native SiO2 film Selective growth of Co islands on ion beam induced nucleation centers in a native SiO2 film (en)
skos:notation	RIV/00216305:26210/09:PU80279!RIV10-MSM-26210___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GEFON/06/E001), P(KAN400100701), P(LC06040), Z(MSM0021630508)
http://linked.open...iv/cisloPeriodika	8
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Kolíbal, Miroslav Mach, Jindřich Šikola, Tomáš Čechal, Jan Tomanec, Ondřej Škoda, David Hrnčíř, Tomáš Koňáková, Kateřina
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta strojního inženýrství
http://linked.open...dnocenehoVysledku	340656
http://linked.open...ai/riv/idVysledku	RIV/00216305:26210/09:PU80279
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Focused ion beam, FIB, Silicon, Si, Silicon dioxide, SiO2, Cobalt, Co, Guided self-assembly (en)
http://linked.open.../riv/klicoveSlovo	Silicon Co Si SiO2 FIB Silicon dioxide Cobalt Focused ion beam Guided self-assembly
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[72EC0D40AB41]
http://linked.open...i/riv/nazevZdroje	Journal of Aplied Physics
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	8 (xsd:int)
http://linked.open...cetTvurcuVysledku	8 (xsd:int)
http://linked.open...vavai/riv/projekt	Functional hybrid nanosystems of semiconductors and metals with organic materials (FUNS) Spin-dependent transport and electronic correlations in nanostructures Structures for Nanophotonics and Nanoelectronics
http://linked.open...UplatneniVysledku	2009
http://linked.open...v/svazekPeriodika	105
http://linked.open...iv/tvurceVysledku	Kolíbal, Miroslav Mach, Jindřich Šikola, Tomáš Čechal, Jan Škoda, David Hrnčíř, Tomáš Tomanec, Ondřej Koňáková, Kateřina
http://linked.open...n/vavai/riv/zamer	Anorganické nanomateriály a nanostruktury: vytváření, analýza, vlastnosti
issn	0021-8979
number of pages	6 (xsd:int)
http://localhost/t...ganizacniJednotka	26210
is http://linked.open...avai/riv/vysledek of	Selective growth of Co islands on ion beam induced nucleation centers in a native SiO2 film Selective growth of Co islands on ion beam induced nucleation centers in a native SiO2 film Selective growth of Co islands on ion beam induced nucleation centers in a native SiO2 film Selective growth of Co islands on ion beam induced nucleation centers in a native SiO2 film

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