About: Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The study of the influence of the annealing on the mechanical and optical properties of the plasma deposited DLC films is performed. The DLC films were prepared for different values of hydrogen content from the mixture of methan and hydrogen in PECVD reactor. The optical properties of aforementioned DLC films were studied ex-situ using variable angle spectroscopic ellipsometry and spectroscopic reflectometry applied within the near-UV, visible and near-IR regions. For optical constants determination our dispersion model based on parametrization of the densities of electronic states was used. The dependence of the hardness and elastic modulus on the hydrogen content in the deposition feed was determined using depth sensing indentation technique.The connection between the hardness and elastic modulus on the one hand and optical constants on the other hand was shown. The annealing of the DLC films strongly changed their mechanical, optical and electrical properties. The study of the influence of the annealing on the mechanical and optical properties of the plasma deposited DLC films is performed. The DLC films were prepared for different values of hydrogen content from the mixture of methan and hydrogen in PECVD reactor. The optical properties of aforementioned DLC films were studied ex-situ using variable angle spectroscopic ellipsometry and spectroscopic reflectometry applied within the near-UV, visible and near-IR regions. For optical constants determination our dispersion model based on parametrization of the densities of electronic states was used. The dependence of the hardness and elastic modulus on the hydrogen content in the deposition feed was determined using depth sensing indentation technique.The connection between the hardness and elastic modulus on the one hand and optical constants on the other hand was shown. The annealing of the DLC films strongly changed their mechanical, optical and electrical properties. (en)
Title	Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films (en)
skos:prefLabel	Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films (en)
skos:notation	RIV/00216305:26210/07:PU68172!RIV12-MSM-26210___
http://linked.open...avai/riv/aktivita	P S Z
http://linked.open...avai/riv/aktivity	P(GA106/05/0274), S, Z(MSM0021622411)
http://linked.open...iv/cisloPeriodika	4-7
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Ohlídal, Miloslav
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta strojního inženýrství
http://linked.open...dnocenehoVysledku	415147
http://linked.open...ai/riv/idVysledku	RIV/00216305:26210/07:PU68172
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Thermal stability, Optical constants, Electronic structure, Free-carrier anisotropy (en)
http://linked.open.../riv/klicoveSlovo	Electronic structure Thermal stability Optical constants Free-carrier anisotropy
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[474463CE621E]
http://linked.open...i/riv/nazevZdroje	Diamond and Related Materials
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Multiscale approach to relationships between mechanical and microstructural characteristics of materials
http://linked.open...UplatneniVysledku	2007
http://linked.open...v/svazekPeriodika	16
http://linked.open...iv/tvurceVysledku	Buršíková, Vilma Franta, Daniel Nečas, David Ohlídal, Ivan Ohlídal, Miloslav Šťahel, Pavel
http://linked.open...n/vavai/riv/zamer	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
issn	0925-9635
number of pages	5 (xsd:int)
http://localhost/t...ganizacniJednotka	26210
is http://linked.open...avai/riv/vysledek of	Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films

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