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  • In the paper the ability of TOF-LEIS to monitor the growth of ultrathin Ga layers in situ is presented. The FWHM of the Ga peaks in the TOF-LEIS spectra showed a linear dependence on Ga coverage. The analysis of the Ga growth on two Si(111) substrates cleaned in two distinct ways (chemical etching and UHV thermal flashing) revealed changes in the Si peak evolution caused by different growth modes taking place on these two substrates. This has been proved by ex situ AFM measurements as well.
  • In the paper the ability of TOF-LEIS to monitor the growth of ultrathin Ga layers in situ is presented. The FWHM of the Ga peaks in the TOF-LEIS spectra showed a linear dependence on Ga coverage. The analysis of the Ga growth on two Si(111) substrates cleaned in two distinct ways (chemical etching and UHV thermal flashing) revealed changes in the Si peak evolution caused by different growth modes taking place on these two substrates. This has been proved by ex situ AFM measurements as well. (en)
  • In-situ analýza ultratenkých vrstev Ga užitím ToF-LEIS (cs)
Title
  • In situ Analysis of Ga-ultra Thin Films by ToF-LEIS
  • In situ Analysis of Ga-ultra Thin Films by ToF-LEIS (en)
  • In-situ analýza ultratenkých vrstev Ga užitím ToF-LEIS (cs)
skos:prefLabel
  • In situ Analysis of Ga-ultra Thin Films by ToF-LEIS
  • In situ Analysis of Ga-ultra Thin Films by ToF-LEIS (en)
  • In-situ analýza ultratenkých vrstev Ga užitím ToF-LEIS (cs)
skos:notation
  • RIV/00216305:26210/06:PU62922!RIV07-MSM-26210___
http://linked.open.../vavai/riv/strany
  • 318-321
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM0021630508)
http://linked.open...iv/cisloPeriodika
  • 1-2
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 479122
http://linked.open...ai/riv/idVysledku
  • RIV/00216305:26210/06:PU62922
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • low energy ion scattering, AFM, growth, gallium, silicon (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • CZ - Česká republika
http://linked.open...ontrolniKodProRIV
  • [5A7FDCC4FBD1]
http://linked.open...i/riv/nazevZdroje
  • Nuclear Instruments and Methods in Physics Research B
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 249
http://linked.open...iv/tvurceVysledku
  • Kolíbal, Miroslav
  • Kostelník, Petr
  • Šikola, Tomáš
  • Bábor, Petr
  • Průša, Stanislav
  • Bauer, P.
  • Tomanec, Ondřej
  • Potoček, Michal
  • Plojhar, Martin
  • Markin, S. N.
http://linked.open...n/vavai/riv/zamer
issn
  • 0168-583X
number of pages
http://localhost/t...ganizacniJednotka
  • 26210
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