About: UV in-situ degradation of PMPSi analysed by spectroscopic ellipsometry, XPS and TDS

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	PMPSi (poly(methyl-phenylsilane)) films were deposited by the spin-coating method on single crystal silicon substrates from toluene solution. Their thickness was about 200 nm. We have studied the stability of these films, which is crucial for their technological applications [1,2], by in-situ spectroscopic ellipsometry (SE) and X-ray Photoelectron Spectroscopy (XPS). This has been proved as a proper combination of monitoring methods as XPS gives direct insight into compositional and structural changes oof the polymer (5-10 nm below the surface) and the SE technique is very sensitive to the changes in PMPSi films. We have used rotating analyzer ellipsometry in the energy interval 3.4 - 4.8 eV to cover the onset of absorption starting with the lowest excitonic band involving electronic stays localized on Si. The ellipsometer is mounted on an UHV chamber, the angles of incident light can be adjusted to 45 or 67.5 . Our recent study [3] indicates that the Si-Si bonds in the polymer main chain (Si-backbo PMPSi (poly(methyl-phenylsilane)) films were deposited by the spin-coating method on single crystal silicon substrates from toluene solution. Their thickness was about 200 nm. We have studied the stability of these films, which is crucial for their technological applications [1,2], by in-situ spectroscopic ellipsometry (SE) and X-ray Photoelectron Spectroscopy (XPS). This has been proved as a proper combination of monitoring methods as XPS gives direct insight into compositional and structural changes oof the polymer (5-10 nm below the surface) and the SE technique is very sensitive to the changes in PMPSi films. We have used rotating analyzer ellipsometry in the energy interval 3.4 - 4.8 eV to cover the onset of absorption starting with the lowest excitonic band involving electronic stays localized on Si. The ellipsometer is mounted on an UHV chamber, the angles of incident light can be adjusted to 45 or 67.5 . Our recent study [3] indicates that the Si-Si bonds in the polymer main chain (Si-backbo (en) In-situ UV degradace PMPSi studovaná spektroskopickou elipsometrií, XPS a TDS. (cs)
Title	In-situ UV degradace PMPSi studovaná spektroskopickou elipsometrií, XPS a TDS (cs) UV in-situ degradation of PMPSi analysed by spectroscopic ellipsometry, XPS and TDS UV in-situ degradation of PMPSi analysed by spectroscopic ellipsometry, XPS and TDS (en)
skos:prefLabel	In-situ UV degradace PMPSi studovaná spektroskopickou elipsometrií, XPS a TDS (cs) UV in-situ degradation of PMPSi analysed by spectroscopic ellipsometry, XPS and TDS UV in-situ degradation of PMPSi analysed by spectroscopic ellipsometry, XPS and TDS (en)
skos:notation	RIV/00216305:26210/05:PU54249!RIV06-MSM-26210___
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(MSM0021630508)
http://linked.open...vai/riv/dodaniDat	2006
http://linked.open...aciTvurceVysledku	Potoček, Michal Humlíček, Josef Navrátil, Karel Šikola, Tomáš Čechal, Jan Nebojsa, Alois Brandejsová, Eva
http://linked.open.../riv/druhVysledku	A(V) - Audiovizuální tvorba se vzdáleným přístupem
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta strojního inženýrství
http://linked.open...dnocenehoVysledku	548307
http://linked.open...ai/riv/idVysledku	RIV/00216305:26210/05:PU54249
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	spectroscopic ellipsometry; XPS; TDS; PMPSi (en)
http://linked.open.../riv/klicoveSlovo	spectroscopic ellipsometry TDS XPS PMPSi
http://linked.open...i/riv/kodPristupu	L
http://linked.open...ontrolniKodProRIV	[7C352D54B187]
http://linked.open...i/riv/mistoVydani	Vienna
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	7 (xsd:int)
http://linked.open...cetTvurcuVysledku	8 (xsd:int)
http://linked.open...UplatneniVysledku	2005
http://linked.open...iv/tvurceVysledku	Šikola, Tomáš Čechal, Jan Humlíček, Josef Nebojsa, Alois Brandejsová, Eva Potoček, Michal Navrátil, Karel Bonaventurová - Zrzavecká, Olga
http://linked.open...rzeVyzkumneZpravy	1
http://linked.open...n/vavai/riv/zamer	Anorganické nanomateriály a nanostruktury: vytváření, analýza, vlastnosti
http://localhost/t...ganizacniJednotka	26210

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