About: Application of AFM in Microscopy and in Fabrication of Micro/Nanostructures

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In the paper AFM studies of microstructures etched by ion beams into Si and Au surfaces, and AFM local anodic oxidation of Ti thin films is presented. Using the AFM technique the etching limits of inert atoms in production of silicon and silver grids were found. It was proved that the height of Ti oxide lines fabricated by AFM increases linearly with the voltage between a tip and a sample. On the other hand, the half-width of the lines did not depend linearly on this voltage. The results are useful forr studies of quantum effects in nanostructures and experiments in fabrication of nanoelectronic devices (e.g. SET). In the paper AFM studies of microstructures etched by ion beams into Si and Au surfaces, and AFM local anodic oxidation of Ti thin films is presented. Using the AFM technique the etching limits of inert atoms in production of silicon and silver grids were found. It was proved that the height of Ti oxide lines fabricated by AFM increases linearly with the voltage between a tip and a sample. On the other hand, the half-width of the lines did not depend linearly on this voltage. The results are useful forr studies of quantum effects in nanostructures and experiments in fabrication of nanoelectronic devices (e.g. SET). (en) Článek se zabývá studiem mikrostruktur leptaných iontovými svazky do Si a Au povrchů a lokální anodickou oxidací tenkých vrstev Ti. (cs)
Title	Application of AFM in Microscopy and in Fabrication of Micro/Nanostructures Application of AFM in Microscopy and in Fabrication of Micro/Nanostructures (en) Aplikace AFM pro mikroskopii a tvorbu mikro/nanostruktur. (cs)
skos:prefLabel	Application of AFM in Microscopy and in Fabrication of Micro/Nanostructures Application of AFM in Microscopy and in Fabrication of Micro/Nanostructures (en) Aplikace AFM pro mikroskopii a tvorbu mikro/nanostruktur. (cs)
skos:notation	RIV/00216305:26210/02:PU29189!RIV06-MSM-26210___
http://linked.open.../vavai/riv/strany	352-355
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(ME 480), Z(MSM 262100002)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2006
http://linked.open...aciTvurceVysledku	Šikola, Tomáš Spousta, Jiří Škoda, David Kalousek, Radek Lopour, Filip
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta strojního inženýrství
http://linked.open...dnocenehoVysledku	638757
http://linked.open...ai/riv/idVysledku	RIV/00216305:26210/02:PU29189
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	AFM fabrication, local anodic oxidation, oxide nanostructures (en)
http://linked.open.../riv/klicoveSlovo	local anodic oxidation AFM fabrication oxide nanostructures
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[98C485042B3E]
http://linked.open...i/riv/nazevZdroje	Surface and Interface Analysis
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	http://linked.opendata.cz/resource/domain/vavai/projekt/ME%20480
http://linked.open...UplatneniVysledku	2002
http://linked.open...v/svazekPeriodika	34
http://linked.open...iv/tvurceVysledku	Spousta, Jiří Šikola, Tomáš Škoda, David Matějka, František Kalousek, Radek Lopour, Filip
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20262100002
issn	0142-2421
number of pages	4 (xsd:int)
http://localhost/t...ganizacniJednotka	26210

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