Attributes | Values |
---|
rdf:type
| |
Description
| - The etching ability of low energy Ar ions to produce microstructures in Si and Ag substrates and to modify surfaces of refractory materials like ceramics was proved. The microstructures with pattern heights up to 90 nm (Si) and 300 nm (Ag) were created. Despite relatively low energies of ions, interesting significant ion-beam induced modifications of alumina surfaces were found.
- The etching ability of low energy Ar ions to produce microstructures in Si and Ag substrates and to modify surfaces of refractory materials like ceramics was proved. The microstructures with pattern heights up to 90 nm (Si) and 300 nm (Ag) were created. Despite relatively low energies of ions, interesting significant ion-beam induced modifications of alumina surfaces were found. (en)
|
Title
| - Etching of Microstructures and Modification of Solid Surfaces by Low Energy Ion Beams
- Etching of Microstructures and Modification of Solid Surfaces by Low Energy Ion Beams (en)
|
skos:prefLabel
| - Etching of Microstructures and Modification of Solid Surfaces by Low Energy Ion Beams
- Etching of Microstructures and Modification of Solid Surfaces by Low Energy Ion Beams (en)
|
skos:notation
| - RIV/00216305:26210/00:00000265!RIV/2001/MSM/262101/N
|
http://linked.open.../vavai/riv/strany
| |
http://linked.open...avai/riv/aktivita
| |
http://linked.open...avai/riv/aktivity
| |
http://linked.open...vai/riv/dodaniDat
| |
http://linked.open...aciTvurceVysledku
| - Dittrichová, Libuše
- Spousta, Jiří
- Šikola, Tomáš
- Bábor, Petr
- Lopour, Filip
|
http://linked.open.../riv/druhVysledku
| |
http://linked.open...iv/duvernostUdaju
| |
http://linked.open...titaPredkladatele
| |
http://linked.open...dnocenehoVysledku
| |
http://linked.open...ai/riv/idVysledku
| - RIV/00216305:26210/00:00000265
|
http://linked.open...riv/jazykVysledku
| |
http://linked.open.../riv/klicovaSlova
| - Low Energy Ion Beams; Etching; Modification; Microstructures; Ceramics; (en)
|
http://linked.open.../riv/klicoveSlovo
| |
http://linked.open...ontrolniKodProRIV
| |
http://linked.open...i/riv/mistoVydani
| |
http://linked.open...i/riv/nazevZdroje
| - Micro Materials - Micro Mat 2000, Berlin
|
http://linked.open...in/vavai/riv/obor
| |
http://linked.open...ichTvurcuVysledku
| |
http://linked.open...cetTvurcuVysledku
| |
http://linked.open...UplatneniVysledku
| |
http://linked.open...iv/tvurceVysledku
| - Dittrichová, Libuše
- Spousta, Jiří
- Šikola, Tomáš
- Bábor, Petr
- Matějka, František
- Lopour, Filip
- Duarte, Juan
|
http://linked.open...n/vavai/riv/zamer
| |
number of pages
| |
http://purl.org/ne...btex#hasPublisher
| - Micro Materials - Micro Mat 2000, Berlin
|
https://schema.org/isbn
| |
http://localhost/t...ganizacniJednotka
| |