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Description
  • The etching ability of low energy Ar ions to produce microstructures in Si and Ag substrates and to modify surfaces of refractory materials like ceramics was proved. The microstructures with pattern heights up to 90 nm (Si) and 300 nm (Ag) were created. Despite relatively low energies of ions, interesting significant ion-beam induced modifications of alumina surfaces were found.
  • The etching ability of low energy Ar ions to produce microstructures in Si and Ag substrates and to modify surfaces of refractory materials like ceramics was proved. The microstructures with pattern heights up to 90 nm (Si) and 300 nm (Ag) were created. Despite relatively low energies of ions, interesting significant ion-beam induced modifications of alumina surfaces were found. (en)
Title
  • Etching of Microstructures and Modification of Solid Surfaces by Low Energy Ion Beams
  • Etching of Microstructures and Modification of Solid Surfaces by Low Energy Ion Beams (en)
skos:prefLabel
  • Etching of Microstructures and Modification of Solid Surfaces by Low Energy Ion Beams
  • Etching of Microstructures and Modification of Solid Surfaces by Low Energy Ion Beams (en)
skos:notation
  • RIV/00216305:26210/00:00000265!RIV/2001/MSM/262101/N
http://linked.open.../vavai/riv/strany
  • 919
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM 262100002)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
  • Dittrichová, Libuše
  • Spousta, Jiří
  • Šikola, Tomáš
  • Bábor, Petr
  • Lopour, Filip
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 710543
http://linked.open...ai/riv/idVysledku
  • RIV/00216305:26210/00:00000265
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Low Energy Ion Beams; Etching; Modification; Microstructures; Ceramics; (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [62DB461CBC43]
http://linked.open...i/riv/mistoVydani
  • Berlín, SNR
http://linked.open...i/riv/nazevZdroje
  • Micro Materials - Micro Mat 2000, Berlin
http://linked.open...in/vavai/riv/obor
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http://linked.open...cetTvurcuVysledku
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http://linked.open...iv/tvurceVysledku
  • Dittrichová, Libuše
  • Spousta, Jiří
  • Šikola, Tomáš
  • Bábor, Petr
  • Matějka, František
  • Lopour, Filip
  • Duarte, Juan
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Micro Materials - Micro Mat 2000, Berlin
https://schema.org/isbn
  • 3-932434-15-3
http://localhost/t...ganizacniJednotka
  • 26210
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