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rdf:type
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Description
| - In the contribution the application of the ion assisted deposition method (IBAD) for deposition of thin films/multilayers of metals (Co, Ni, Ti, Zr, Mo, etc.) and nitrides and oxides of these metals will be disscused. The attention will be paid to the morphology, composition, structure, optical, electrical, and magnetic properties of these films, in particular as a funtction of the assisting ion beam energy and flux.
- In the contribution the application of the ion assisted deposition method (IBAD) for deposition of thin films/multilayers of metals (Co, Ni, Ti, Zr, Mo, etc.) and nitrides and oxides of these metals will be disscused. The attention will be paid to the morphology, composition, structure, optical, electrical, and magnetic properties of these films, in particular as a funtction of the assisting ion beam energy and flux. (en)
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Title
| - Deposition of Thin Films/Multilayers by IBAD
- Deposition of Thin Films/Multilayers by IBAD (en)
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skos:prefLabel
| - Deposition of Thin Films/Multilayers by IBAD
- Deposition of Thin Films/Multilayers by IBAD (en)
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skos:notation
| - RIV/00216305:26210/00:00000127!RIV/2001/MSM/262101/N
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http://linked.open.../vavai/riv/strany
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
| - Dittrichová, Libuše
- Spousta, Jiří
- Zlámal, Jakub
- Šikola, Tomáš
- Lopour, Filip
- Tichopádek, Petr
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/00216305:26210/00:00000127
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - IBAD; thin films; multilayers (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/mistoVydani
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http://linked.open...i/riv/nazevZdroje
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...UplatneniVysledku
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http://linked.open...iv/tvurceVysledku
| - Dittrichová, Libuše
- Spousta, Jiří
- Zlámal, Jakub
- Šikola, Tomáš
- Nebojsa, Alois
- Lopour, Filip
- Tichopádek, Petr
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http://linked.open...n/vavai/riv/zamer
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number of pages
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http://purl.org/ne...btex#hasPublisher
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https://schema.org/isbn
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http://localhost/t...ganizacniJednotka
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