About: Study of As50Se50 Thin Film Dissolution Kinetics in Amine based Solutions     Goto   Sponge   NotDistinct   Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

AttributesValues
rdf:type
rdfs:seeAlso
Description
  • Chalcogenide glass thin films are suitable materials for micro optical elements fabrication due to their convenient physical and chemical properties. They are generally photosensitive and thus can be selectively etched. Therefore they can be exploited as photoresists in photolithography. In this paper we deal with the study of As50Se50 thin films dissolution kinetics in EDA based solutions. The detailed evolution of the etching curves is discussed and the dependences of the average etching rate on the composition and temperature of the etching bath are described.
  • Chalcogenide glass thin films are suitable materials for micro optical elements fabrication due to their convenient physical and chemical properties. They are generally photosensitive and thus can be selectively etched. Therefore they can be exploited as photoresists in photolithography. In this paper we deal with the study of As50Se50 thin films dissolution kinetics in EDA based solutions. The detailed evolution of the etching curves is discussed and the dependences of the average etching rate on the composition and temperature of the etching bath are described. (en)
Title
  • Study of As50Se50 Thin Film Dissolution Kinetics in Amine based Solutions
  • Study of As50Se50 Thin Film Dissolution Kinetics in Amine based Solutions (en)
skos:prefLabel
  • Study of As50Se50 Thin Film Dissolution Kinetics in Amine based Solutions
  • Study of As50Se50 Thin Film Dissolution Kinetics in Amine based Solutions (en)
skos:notation
  • RIV/00216275:25310/13:39897392!RIV14-GA0-25310___
http://linked.open...avai/predkladatel
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • I, P(GAP204/11/0832)
http://linked.open...iv/cisloPeriodika
  • 1
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 108648
http://linked.open...ai/riv/idVysledku
  • RIV/00216275:25310/13:39897392
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • As50Se50; Etching; Chalcogenide thin film (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • NL - Nizozemsko
http://linked.open...ontrolniKodProRIV
  • [A24C283F55AB]
http://linked.open...i/riv/nazevZdroje
  • Physics Procedia
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 44
http://linked.open...iv/tvurceVysledku
  • Vlček, Miroslav
  • Pálka, Karel
  • Kovalskiy, Andriy
issn
  • 1875-3892
number of pages
http://bibframe.org/vocab/doi
  • 10.1016/j.phpro.2013.04.015
http://localhost/t...ganizacniJednotka
  • 25310
Faceted Search & Find service v1.16.118 as of Jun 21 2024


Alternative Linked Data Documents: ODE     Content Formats:   [cxml] [csv]     RDF   [text] [turtle] [ld+json] [rdf+json] [rdf+xml]     ODATA   [atom+xml] [odata+json]     Microdata   [microdata+json] [html]    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software