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Description
| - Byly spřipraveny a charakterizovány amorfní tenké filmy As40S60 a As40Se60 připravených metodou plasma-enhanced CVD (cs)
- Amorphous chalcogenide lms of chemical compositions As40S60 and As40Se60 have been prepared by plasma-enhanced chemical vapor deposition.An improved optical characterization method suitable for non-uniform thin lms, which also takes into consideration the weak absorption in the substrate, has successfully been applied.The values of the average thickness and thickness variation, d and Dd, respectively, were crossed-checked with those measured by use of a surface-proling stylus instrument, and dierences between the directly measured and the optically calculated values were, in all cases, less than 2%.A comparison between the structural and optical properties of these PECVD lms, and those of the same chemical composition prepared by thermal evaporation, is systematically made in this paper.
- Amorphous chalcogenide lms of chemical compositions As40S60 and As40Se60 have been prepared by plasma-enhanced chemical vapor deposition.An improved optical characterization method suitable for non-uniform thin lms, which also takes into consideration the weak absorption in the substrate, has successfully been applied.The values of the average thickness and thickness variation, d and Dd, respectively, were crossed-checked with those measured by use of a surface-proling stylus instrument, and dierences between the directly measured and the optically calculated values were, in all cases, less than 2%.A comparison between the structural and optical properties of these PECVD lms, and those of the same chemical composition prepared by thermal evaporation, is systematically made in this paper. (en)
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Title
| - Strukturní a optická charakterizace amorfních tenkých filmů As40S60 a As40Se60 připravených metodou CVD (cs)
- Structural and optical characterization of amorphous As40S60 and As40Se60 lms prepared by plasma-enhanced chemical vapor deposition
- Structural and optical characterization of amorphous As40S60 and As40Se60 lms prepared by plasma-enhanced chemical vapor deposition (en)
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skos:prefLabel
| - Strukturní a optická charakterizace amorfních tenkých filmů As40S60 a As40Se60 připravených metodou CVD (cs)
- Structural and optical characterization of amorphous As40S60 and As40Se60 lms prepared by plasma-enhanced chemical vapor deposition
- Structural and optical characterization of amorphous As40S60 and As40Se60 lms prepared by plasma-enhanced chemical vapor deposition (en)
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skos:notation
| - RIV/00216275:25310/04:00001378!RIV08-MSM-25310___
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http://linked.open.../vavai/riv/strany
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
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http://linked.open...iv/cisloPeriodika
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/00216275:25310/04:00001378
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - amorphous chalcogenide films; PECVD (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...odStatuVydavatele
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/nazevZdroje
| - Journal of Non-Crystalline Solids
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...UplatneniVysledku
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http://linked.open...v/svazekPeriodika
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http://linked.open...iv/tvurceVysledku
| - Vlček, Miroslav
- Prieto-Alcón, R.
- González-Leal, J. M.
- Márquer, E.
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http://linked.open...n/vavai/riv/zamer
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issn
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number of pages
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http://localhost/t...ganizacniJednotka
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