About: Structural and optical characterization of amorphous As40S60 and As40Se60 films prepared by plasma-enhanced chemical vapor deposition     Goto   Sponge   NotDistinct   Permalink

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  • Amorphous chalcogenide films of chemical compositions As40S60 and As40Se60 have been prepared by plasma-enhanced chemical vapor deposition.An improved optical characterization method suitable for non-uniform thin films, which also takes into consideration the weak absorption in the substrate, has successfully been applied.The values of the average thickness and thickness variation, d and Dd, respectively, were crossed-checked with those measured by use of a surface-profiling stylus instrument, and differences between the directly measured and the optically calculated values were, in all cases, less than 2%.A comparison between the structural and optical properties of these PECVD films, and those of the same chemical composition prepared by thermal evaporation, is systematically made in this paper.
  • Amorphous chalcogenide films of chemical compositions As40S60 and As40Se60 have been prepared by plasma-enhanced chemical vapor deposition.An improved optical characterization method suitable for non-uniform thin films, which also takes into consideration the weak absorption in the substrate, has successfully been applied.The values of the average thickness and thickness variation, d and Dd, respectively, were crossed-checked with those measured by use of a surface-profiling stylus instrument, and differences between the directly measured and the optically calculated values were, in all cases, less than 2%.A comparison between the structural and optical properties of these PECVD films, and those of the same chemical composition prepared by thermal evaporation, is systematically made in this paper. (en)
  • Byly spřipraveny a charakterizovány amorfní tenké filmy As40S60 a As40Se60 připravených metodou plasma-enhanced CVD (cs)
Title
  • Structural and optical characterization of amorphous As40S60 and As40Se60 films prepared by plasma-enhanced chemical vapor deposition
  • Structural and optical characterization of amorphous As40S60 and As40Se60 films prepared by plasma-enhanced chemical vapor deposition (en)
  • Strukturní a optická charakterizace amorfních tenkých filmů As40S60 a As40Se60 připravených metodou CVD (cs)
skos:prefLabel
  • Structural and optical characterization of amorphous As40S60 and As40Se60 films prepared by plasma-enhanced chemical vapor deposition
  • Structural and optical characterization of amorphous As40S60 and As40Se60 films prepared by plasma-enhanced chemical vapor deposition (en)
  • Strukturní a optická charakterizace amorfních tenkých filmů As40S60 a As40Se60 připravených metodou CVD (cs)
skos:notation
  • RIV/00216275:25310/04:00001378!RIV/2005/MSM/253105/N
http://linked.open.../vavai/riv/strany
  • 88-92
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM 253100001)
http://linked.open...iv/cisloPeriodika
  • 345&34
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 588446
http://linked.open...ai/riv/idVysledku
  • RIV/00216275:25310/04:00001378
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http://linked.open.../riv/klicovaSlova
  • amorphous chalcogenide films;PECVD; (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • NL - Nizozemsko
http://linked.open...ontrolniKodProRIV
  • [507992BD3C77]
http://linked.open...i/riv/nazevZdroje
  • Journal of Non-Crystalline Solids
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • Neuveden
http://linked.open...iv/tvurceVysledku
  • Vlček, Miroslav
  • Prieto-Alcón, R.
  • González-Leal, J. M.
  • Márquer, E.
http://linked.open...n/vavai/riv/zamer
issn
  • 0022-3093
number of pages
http://localhost/t...ganizacniJednotka
  • 25310
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