About: Imaging in NIR *SOI, GaN

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About: Imaging in NIR *SOI, GaN Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Tools for imaging of interferences in thin layers. Completed prototype of equipment for imaging of interferences on 150 mm GaN on Si and 150 and 200 mm SOI wafers. Validate the method and equipment with analysis of SOI and GaN wafers (comparison of thickness maps with FTIR and SEM values. Prepare basic technical documentation, working instructions, recipes and metrological instructions. Tools for imaging of interferences in thin layers. Completed prototype of equipment for imaging of interferences on 150 mm GaN on Si and 150 and 200 mm SOI wafers. Validate the method and equipment with analysis of SOI and GaN wafers (comparison of thickness maps with FTIR and SEM values. Prepare basic technical documentation, working instructions, recipes and metrological instructions. (en)
Title	Imaging in NIR SOI, GaN Imaging in NIR SOI, GaN (en)
skos:prefLabel	Imaging in NIR SOI, GaN Imaging in NIR SOI, GaN (en)
skos:notation	RIV/00216224:14740/14:00079946!RIV15-MSM-14740___
http://linked.open...avai/riv/aktivita	N
http://linked.open...avai/riv/aktivity	N
http://linked.open...vai/riv/dodaniDat	2015
http://linked.open...aciTvurceVysledku	Münz, Filip Humlíček, Josef
http://linked.open.../riv/druhVysledku	V/S - Souhrnná výzkumná zpráva
http://linked.open...iv/duvernostUdaju	C - Předmět podléhá obchodnímu tajemství (§17 až 20 Obchodního zákoníku), ale některé údaje jsou upraveny tak, aby byly zveřejnitelné
http://linked.open...titaPredkladatele	Masarykova univerzita / Středoevropský technologický institut
http://linked.open...dnocenehoVysledku	20489
http://linked.open...ai/riv/idVysledku	RIV/00216224:14740/14:00079946
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	layered structures; SOI; GaN; AlGaN; silicon (en)
http://linked.open.../riv/klicoveSlovo	layered structures silicon GaN SOI AlGaN
http://linked.open...ontrolniKodProRIV	[B7B39B295733]
http://linked.open...i/riv/mistoVydani	Masarykova univerzita, Brno
http://linked.open...telVyzkumneZpravy	ONSEMI
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	2 (xsd:int)
http://linked.open...UplatneniVysledku	2014
http://linked.open...iv/tvurceVysledku	Münz, Filip Humlíček, Josef
http://linked.open...rzeVyzkumneZpravy	Report LDDA 2014
number of pages	20 (xsd:int)
http://localhost/t...ganizacniJednotka	14740

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