About: Three-dimensional Epitaxial Si1-xGex, Ge and SiC Crystals on Deeply Patterned Si Substrates     Goto   Sponge   NotDistinct   Permalink

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Description
  • We have recently demonstrated for the example of Ge/Si(001) that crystal defects, wafer bowing can be avoided by combining deep substrate patterning, resulting in dense arrays of highly perfect three-dimensional epitaxial crystals. Here we discuss the extension of the method to layer/substrate combinations with lattice misfits ranging from zero for pure Si/Si(001) up to 20% for 3C-SiC/Si(001).
  • We have recently demonstrated for the example of Ge/Si(001) that crystal defects, wafer bowing can be avoided by combining deep substrate patterning, resulting in dense arrays of highly perfect three-dimensional epitaxial crystals. Here we discuss the extension of the method to layer/substrate combinations with lattice misfits ranging from zero for pure Si/Si(001) up to 20% for 3C-SiC/Si(001). (en)
Title
  • Three-dimensional Epitaxial Si1-xGex, Ge and SiC Crystals on Deeply Patterned Si Substrates
  • Three-dimensional Epitaxial Si1-xGex, Ge and SiC Crystals on Deeply Patterned Si Substrates (en)
skos:prefLabel
  • Three-dimensional Epitaxial Si1-xGex, Ge and SiC Crystals on Deeply Patterned Si Substrates
  • Three-dimensional Epitaxial Si1-xGex, Ge and SiC Crystals on Deeply Patterned Si Substrates (en)
skos:notation
  • RIV/00216224:14740/14:00079266!RIV15-MSM-14740___
http://linked.open...avai/riv/aktivita
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  • P(ED1.1.00/02.0068), P(EE2.3.20.0027)
http://linked.open...iv/cisloPeriodika
  • 6
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  • 50483
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14740/14:00079266
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  • Aspect ratio; Chemical vapor deposition; Crystals; Dislocations; Germanium; Silicon; heteroepitaxy (en)
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http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
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  • [6BDDC6156097]
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  • ECS Transactions
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  • 64
http://linked.open...iv/tvurceVysledku
  • Mancarella, F.
  • Meduňa, Mojmír
  • Neels, A.
  • von Känel, Hans
  • Chrastina, Daniel
  • Falub, Claudiu Valentin
  • Isa, Fabio
  • Kaufmann, R.
  • Kreiliger, Thomas
  • Marzegalli, Anna
  • Miglio, Leo
  • La Via, F.
  • Dommann, Alex
  • Isella, Giovanni
  • Taboada, Alfonso
  • Anzalone, R.
  • Barthazy, E. J.
  • Bergamaschini, Roberto
  • Crippa, D.
  • Mauceri, M.
  • Müller, Elisabeth
  • Niedermann, Philippe
  • Piluso, N.
  • Puglisi, M.
issn
  • 1938-5862
number of pages
http://bibframe.org/vocab/doi
  • 10.1149/06406.0631ecst
http://localhost/t...ganizacniJednotka
  • 14740
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