About: Understanding of hybrid PVD–PECVD process with the aim of growing hard nc-TiC/a-C:H coatings using industrial devices with a rotating cylindrical magnetron

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About: Understanding of hybrid PVD–PECVD process with the aim of growing hard nc-TiC/a-C:H coatings using industrial devices with a rotating cylindrical magnetron Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Titanium–carbon hard coatings were deposited by sputtering using a rotating cylindrical titanium target in an argon/acetylene gas mixture on cemented tungsten-carbide substrates which were placed on a DC-biasable holder to performa complex rotation around the central rotating cylindrical Ti cathode.While the optimal deposition process parameters to growthe coating of the highest possible hardness and lowfriction coefficientwere sought, the plasma parameters were monitored and correlated with the properties of the deposited coatings. The Ti/Ar line intensity and the cathode voltage exhibited a sudden drop at the conditions forwhich themaximal hardness was reached. EDX analyses also showed a sudden drop in the atomic concentration of titanium and a sudden increase in that of carbon at the same moment. Titanium–carbon hard coatings were deposited by sputtering using a rotating cylindrical titanium target in an argon/acetylene gas mixture on cemented tungsten-carbide substrates which were placed on a DC-biasable holder to performa complex rotation around the central rotating cylindrical Ti cathode.While the optimal deposition process parameters to growthe coating of the highest possible hardness and lowfriction coefficientwere sought, the plasma parameters were monitored and correlated with the properties of the deposited coatings. The Ti/Ar line intensity and the cathode voltage exhibited a sudden drop at the conditions forwhich themaximal hardness was reached. EDX analyses also showed a sudden drop in the atomic concentration of titanium and a sudden increase in that of carbon at the same moment. (en)
Title	Understanding of hybrid PVD–PECVD process with the aim of growing hard nc-TiC/a-C:H coatings using industrial devices with a rotating cylindrical magnetron Understanding of hybrid PVD–PECVD process with the aim of growing hard nc-TiC/a-C:H coatings using industrial devices with a rotating cylindrical magnetron (en)
skos:prefLabel	Understanding of hybrid PVD–PECVD process with the aim of growing hard nc-TiC/a-C:H coatings using industrial devices with a rotating cylindrical magnetron Understanding of hybrid PVD–PECVD process with the aim of growing hard nc-TiC/a-C:H coatings using industrial devices with a rotating cylindrical magnetron (en)
skos:notation	RIV/00216224:14310/14:00074185!RIV15-MSM-14310___
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(ED2.1.00/03.0086), P(GAP205/12/0407)
http://linked.open...iv/cisloPeriodika	September
http://linked.open...vai/riv/dodaniDat	2015
http://linked.open...aciTvurceVysledku	Žemlička, Radek Souček, Pavel Vašina, Petr Buršíková, Vilma
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	51918
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/14:00074185
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Nanocomposite; Magnetron sputtering; Process control; Mechanical properties; Titanium–carbon; Industrial process (en)
http://linked.open.../riv/klicoveSlovo	Magnetron sputtering Mechanical properties Process control Nanocomposite Industrial process Titanium–carbon
http://linked.open...odStatuVydavatele	CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV	[803D03A117CE]
http://linked.open...i/riv/nazevZdroje	Surface & Coatings Technology
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...vavai/riv/projekt	Regional R&D center for low-cost plasma and nanotechnology surface modifications Understanding of Hybrid PVD-PECVD Process with Aim to Control Grow of Nanostructured Composite Coatings
http://linked.open...UplatneniVysledku	2014
http://linked.open...v/svazekPeriodika	255
http://linked.open...iv/tvurceVysledku	Buršík, Jiří Buršíková, Vilma Vašina, Petr Žemlička, Radek Jílek, Mojmír Souček, Pavel Vogl, Petr
http://linked.open...ain/vavai/riv/wos	000343348800019
issn	0257-8972
number of pages	6 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.surfcoat.2014.02.069
http://localhost/t...ganizacniJednotka	14310

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