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  • Titanium carbide/carbon nanocomposite hard coatings, which consist of TiC nanoparticles buried in amorphous carbon matrix, are prepared by a hybrid plasma process combining magnetron sputtering of a titanium target and plasma enhanced chemical vapor deposition using methane as a source for the growth of amorphous carbon. A particular attention was paid to the comparison of the surface and the bulk chemical compositions of the films determined by different analysis techniques: X-ray photoelectron spectroscopy (XPS), Rutherford backscattering spectrometry (RBS), wavelength dispersive X-ray spectroscopy (WDS) and energy dispersive X-ray spectroscopy (EDS). XPS and EDS show an underestimation in carbon concentration compared to RBS and WDS which provide similar values. This underestimation is more important in case of XPS and it is mainly attributed to the presence of oxygen contamination on the surface of the films strongly bonded to titanium.
  • Titanium carbide/carbon nanocomposite hard coatings, which consist of TiC nanoparticles buried in amorphous carbon matrix, are prepared by a hybrid plasma process combining magnetron sputtering of a titanium target and plasma enhanced chemical vapor deposition using methane as a source for the growth of amorphous carbon. A particular attention was paid to the comparison of the surface and the bulk chemical compositions of the films determined by different analysis techniques: X-ray photoelectron spectroscopy (XPS), Rutherford backscattering spectrometry (RBS), wavelength dispersive X-ray spectroscopy (WDS) and energy dispersive X-ray spectroscopy (EDS). XPS and EDS show an underestimation in carbon concentration compared to RBS and WDS which provide similar values. This underestimation is more important in case of XPS and it is mainly attributed to the presence of oxygen contamination on the surface of the films strongly bonded to titanium. (en)
Title
  • Titanium carbide/carbon nanocomposite hard coatings: A comparative study between various chemical analysis tools
  • Titanium carbide/carbon nanocomposite hard coatings: A comparative study between various chemical analysis tools (en)
skos:prefLabel
  • Titanium carbide/carbon nanocomposite hard coatings: A comparative study between various chemical analysis tools
  • Titanium carbide/carbon nanocomposite hard coatings: A comparative study between various chemical analysis tools (en)
skos:notation
  • RIV/00216224:14310/14:00073845!RIV15-MSM-14310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(ED2.1.00/03.0086), P(GAP205/12/0407)
http://linked.open...iv/cisloPeriodika
  • October
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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  • 50624
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  • RIV/00216224:14310/14:00073845
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • nanocomposite thin film; carbon; XPS; WDS; EDS; RBS (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV
  • [885E2BAFC550]
http://linked.open...i/riv/nazevZdroje
  • Surface & coatings technology
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  • 256
http://linked.open...iv/tvurceVysledku
  • Buršíková, Vilma
  • Vašina, Petr
  • Souček, Pavel
  • Ohtake, N.
  • Takashima, M.
  • Tessier, P. Y.
  • Akasaka, H.
  • Angleraud, B.
  • Christien, F.
  • Gautron, E.
  • Granier, A.
  • Suzuki, T.
  • El Mel, A. A.
http://linked.open...ain/vavai/riv/wos
  • 000343349600008
issn
  • 0257-8972
number of pages
http://bibframe.org/vocab/doi
  • 10.1016/j.surfcoat.2013.12.068
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  • 14310
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