About: On the control of deposition process for enhanced mechanical properties of nc-TiC/a-C:H coatings with DC magnetron sputtering at low or high ion flux

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About: On the control of deposition process for enhanced mechanical properties of nc-TiC/a-C:H coatings with DC magnetron sputtering at low or high ion flux Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Nanocomposite coatings consisting of nanocrystallites embedded in an amorphous matrix can be tailored to exhibit unusual combination of properties such as high hardness and modulus combined with low friction and wear. The properties of the coatings are governed by parameters of the deposition plasma, which are a nontrivial function of the deposition process parameters. Energy flux onto the growing films provided by ionized species is one of the key parameters influencing the properties of coatings. This study is focused on the influence of ion flux on the properties of the growing nc-TiC/a-C:H thin film in order to achieve enhanced mechanical properties. Two different magnetic field configurations were used. The saturated ion current on the substrate was found to be seven times higher in the strongly unbalanced magnetic configuration as compared to well-balanced configuration. Nanocomposite coatings consisting of nanocrystallites embedded in an amorphous matrix can be tailored to exhibit unusual combination of properties such as high hardness and modulus combined with low friction and wear. The properties of the coatings are governed by parameters of the deposition plasma, which are a nontrivial function of the deposition process parameters. Energy flux onto the growing films provided by ionized species is one of the key parameters influencing the properties of coatings. This study is focused on the influence of ion flux on the properties of the growing nc-TiC/a-C:H thin film in order to achieve enhanced mechanical properties. Two different magnetic field configurations were used. The saturated ion current on the substrate was found to be seven times higher in the strongly unbalanced magnetic configuration as compared to well-balanced configuration. (en)
Title	On the control of deposition process for enhanced mechanical properties of nc-TiC/a-C:H coatings with DC magnetron sputtering at low or high ion flux On the control of deposition process for enhanced mechanical properties of nc-TiC/a-C:H coatings with DC magnetron sputtering at low or high ion flux (en)
skos:prefLabel	On the control of deposition process for enhanced mechanical properties of nc-TiC/a-C:H coatings with DC magnetron sputtering at low or high ion flux On the control of deposition process for enhanced mechanical properties of nc-TiC/a-C:H coatings with DC magnetron sputtering at low or high ion flux (en)
skos:notation	RIV/00216224:14310/14:00073844!RIV15-MSM-14310___
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(ED2.1.00/03.0086), P(GAP205/12/0407), P(GD104/09/H080)
http://linked.open...iv/cisloPeriodika	September
http://linked.open...vai/riv/dodaniDat	2015
http://linked.open...aciTvurceVysledku	Souček, Pavel Caha, Ondřej Schmidtová, Tereza Zábranský, Lukáš Vašina, Petr Buršíková, Vilma
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	34417
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/14:00073844
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	nanocomposite; magnetron sputtering; ion flux on the substrate; titanium carbide; enhanced mechanical properties (en)
http://linked.open.../riv/klicoveSlovo	magnetron sputtering nanocomposite titanium carbide enhanced mechanical properties ion flux on the substrate
http://linked.open...odStatuVydavatele	CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV	[BB0E93E56321]
http://linked.open...i/riv/nazevZdroje	Surface & coatings technology
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	6 (xsd:int)
http://linked.open...cetTvurcuVysledku	11 (xsd:int)
http://linked.open...vavai/riv/projekt	Plasmachemical processes and their technological applications Regional R&D center for low-cost plasma and nanotechnology surface modifications Understanding of Hybrid PVD-PECVD Process with Aim to Control Grow of Nanostructured Composite Coatings
http://linked.open...UplatneniVysledku	2014
http://linked.open...v/svazekPeriodika	255
http://linked.open...iv/tvurceVysledku	Buršík, Jiří Buršíková, Vilma Vašina, Petr Caha, Ondřej Mikšová, Romana Peřina, Vratislav Schmidtová, Tereza Souček, Pavel Zábranský, Lukáš De Hosson, J.Th.M. Pei, Y. T.
http://linked.open...ain/vavai/riv/wos	000343348800003
issn	0257-8972
number of pages	7 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.surfcoat.2013.11.001
http://localhost/t...ganizacniJednotka	14310

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