About: Improved combination of scalar diffraction theory and Rayleigh-Rice theory and its application to spectroscopic ellipsometry of randomly rough surfaces

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About: Improved combination of scalar diffraction theory and Rayleigh-Rice theory and its application to spectroscopic ellipsometry of randomly rough surfaces Goto Sponge NotDistinct Permalink

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Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
rdfs:seeAlso	http://ac.els-cdn.com/S0040609014002533/1-s2.0-S0040609014002533-main.pdf?_tid=1164e0f6-cca0-11e4-ac1b-00000aab0f01&acdnat=1426595038_4b3a79a484100725154217605bb36278
Description	Expressions for ellipsometric quantities and reflectance presented are based on a heuristic combination of the Rayleigh-Rice theory and the scalar diffraction theory. The latter takes into account the local slopes and shadowing. The second-order Rayleigh-Rice theory is used to express the local electric field on the rough surface and the obtained expressions are then used in the scalar diffraction theory instead of the expressions corresponding to a smooth surface. A numeric method of evaluation of the quadruple integral resulting from this combination of the two theories is developed, utilising a Gauss-like quadrature. The efficiency of the formulae is illustrated by optical characterisation of rough silicon and gallium arsenide surfaces created using anodic and thermal oxidation, respectively, and covered with native oxide layers. The optical characterisation employs variable-angle spectroscopic ellipsometry and spectroscopic reflectometry. (C) 2014 Elsevier B.V. All rights reserved. Expressions for ellipsometric quantities and reflectance presented are based on a heuristic combination of the Rayleigh-Rice theory and the scalar diffraction theory. The latter takes into account the local slopes and shadowing. The second-order Rayleigh-Rice theory is used to express the local electric field on the rough surface and the obtained expressions are then used in the scalar diffraction theory instead of the expressions corresponding to a smooth surface. A numeric method of evaluation of the quadruple integral resulting from this combination of the two theories is developed, utilising a Gauss-like quadrature. The efficiency of the formulae is illustrated by optical characterisation of rough silicon and gallium arsenide surfaces created using anodic and thermal oxidation, respectively, and covered with native oxide layers. The optical characterisation employs variable-angle spectroscopic ellipsometry and spectroscopic reflectometry. (C) 2014 Elsevier B.V. All rights reserved. (en)
Title	Improved combination of scalar diffraction theory and Rayleigh-Rice theory and its application to spectroscopic ellipsometry of randomly rough surfaces Improved combination of scalar diffraction theory and Rayleigh-Rice theory and its application to spectroscopic ellipsometry of randomly rough surfaces (en)
skos:prefLabel	Improved combination of scalar diffraction theory and Rayleigh-Rice theory and its application to spectroscopic ellipsometry of randomly rough surfaces Improved combination of scalar diffraction theory and Rayleigh-Rice theory and its application to spectroscopic ellipsometry of randomly rough surfaces (en)
skos:notation	RIV/00216224:14310/14:00073316!RIV15-MSM-14310___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(ED1.1.00/02.0068), P(ED2.1.00/03.0086), P(TA02010784)
http://linked.open...iv/cisloPeriodika	November
http://linked.open...vai/riv/dodaniDat	2015
http://linked.open...aciTvurceVysledku	Ohlídal, Ivan Nečas, David Franta, Daniel
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	20957
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/14:00073316
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Spectroscopic ellipsometry; Spectroscopic reflectometry; Rayleigh-Rice theory; Scalar diffraction theory; Rough surfaces (en)
http://linked.open.../riv/klicoveSlovo	Rough surfaces Spectroscopic ellipsometry Spectroscopic reflectometry Rayleigh-Rice theory Scalar diffraction theory
http://linked.open...odStatuVydavatele	CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV	[E7F252D6AEBF]
http://linked.open...i/riv/nazevZdroje	Thin Solid Films
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	3 (xsd:int)
http://linked.open...vavai/riv/projekt	Central european institute of technology Regional R&D center for low-cost plasma and nanotechnology surface modifications Optimization of thin film systems used in the optics industry
http://linked.open...UplatneniVysledku	2014
http://linked.open...v/svazekPeriodika	571
http://linked.open...iv/tvurceVysledku	Franta, Daniel Nečas, David Ohlídal, Ivan
http://linked.open...ain/vavai/riv/wos	000346055200068
issn	0040-6090
number of pages	6 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.tsf.2014.02.092
http://localhost/t...ganizacniJednotka	14310

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