About: Comparison of nc-TiC/a-C:H nanocomposite coatings deposited by DC magnetron sputtering at low and high flux of impinging ions     Goto   Sponge   NotDistinct   Permalink

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  • Nanocrystalline titanium carbide embedded in an amorphous (hydrogenated) carbon matrix, is a versatile nanocomposite material combining properties of hard titanium carbide grains and a soft carbon matrix. Depending on the content of the TiC phase and a-C(:H) phase the properties can be tailored from very hard films with hardness reaching over 40 GPa and Young’s modulus higher than 300 GPa respectively to low friction films with friction coefficient around 0.1 and low wear rate. Magnetron sputtering of titanium target in acetylene containing atmosphere is the most used method of nc-TiC/a-C(:H) coatings preparation. In this research, role of energetic ion bombardment on the coating quality was studied in details. A well-balanced magnetic field configuration leading to saturated ion current on the substrate of ~0.3 mA/cm2 and strongly unbalanced magnetic field ~2 mA/cm2 was used.
  • Nanocrystalline titanium carbide embedded in an amorphous (hydrogenated) carbon matrix, is a versatile nanocomposite material combining properties of hard titanium carbide grains and a soft carbon matrix. Depending on the content of the TiC phase and a-C(:H) phase the properties can be tailored from very hard films with hardness reaching over 40 GPa and Young’s modulus higher than 300 GPa respectively to low friction films with friction coefficient around 0.1 and low wear rate. Magnetron sputtering of titanium target in acetylene containing atmosphere is the most used method of nc-TiC/a-C(:H) coatings preparation. In this research, role of energetic ion bombardment on the coating quality was studied in details. A well-balanced magnetic field configuration leading to saturated ion current on the substrate of ~0.3 mA/cm2 and strongly unbalanced magnetic field ~2 mA/cm2 was used. (en)
Title
  • Comparison of nc-TiC/a-C:H nanocomposite coatings deposited by DC magnetron sputtering at low and high flux of impinging ions
  • Comparison of nc-TiC/a-C:H nanocomposite coatings deposited by DC magnetron sputtering at low and high flux of impinging ions (en)
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  • Comparison of nc-TiC/a-C:H nanocomposite coatings deposited by DC magnetron sputtering at low and high flux of impinging ions
  • Comparison of nc-TiC/a-C:H nanocomposite coatings deposited by DC magnetron sputtering at low and high flux of impinging ions (en)
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  • RIV/00216224:14310/13:00066347!RIV14-MSM-14310___
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  • P(ED2.1.00/03.0086), P(GAP205/12/0407)
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  • 66262
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  • RIV/00216224:14310/13:00066347
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  • magnetron sputtering; nanocomposites; TiC (en)
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  • [A4E6DB540A05]
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  • Buršík, Jiří
  • Buršíková, Vilma
  • Vašina, Petr
  • Caha, Ondřej
  • Peřina, Vratislav
  • Schmidtová, Tereza
  • Souček, Pavel
  • Zábranský, Lukáš
  • De Hosson, J.Th.M.
  • Pei, Yutao
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  • 14310
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