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  • It is commonly observed that thin layers, especially formed by compound material deposited in planar magnetron using the same deposition manners, can have slightly different properties and composition. This research shows that one of the important factors to be considered thinking about fluxes of different species on the substrate is the target erosion state. Using Monte Carlo simulation optimal conditions for reproducibly depositing thin layer were calculated.
  • It is commonly observed that thin layers, especially formed by compound material deposited in planar magnetron using the same deposition manners, can have slightly different properties and composition. This research shows that one of the important factors to be considered thinking about fluxes of different species on the substrate is the target erosion state. Using Monte Carlo simulation optimal conditions for reproducibly depositing thin layer were calculated. (en)
Title
  • On sputtered particle distribution towards substrate during target erosion - simulation and experiment
  • On sputtered particle distribution towards substrate during target erosion - simulation and experiment (en)
skos:prefLabel
  • On sputtered particle distribution towards substrate during target erosion - simulation and experiment
  • On sputtered particle distribution towards substrate during target erosion - simulation and experiment (en)
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  • RIV/00216224:14310/13:00066337!RIV14-MSM-14310___
http://linked.open...avai/predkladatel
http://linked.open...avai/riv/aktivita
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  • P(ED2.1.00/03.0086), P(GAP205/12/0407)
http://linked.open...vai/riv/dodaniDat
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  • 93811
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  • RIV/00216224:14310/13:00066337
http://linked.open...riv/jazykVysledku
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  • Sputtering; Magnetron; Monte Carlo simulation; Compound material (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [EA0F3344A398]
http://linked.open...v/mistoKonaniAkce
  • Liberec
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  • Liberec
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  • PAPN 2013: Book of extended abstracts
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http://linked.open...vavai/riv/projekt
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  • Vašina, Petr
  • Schmidtová, Tereza
  • Klein, Peter
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
number of pages
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  • Technická univerzita v Liberci
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  • 9788073729882
http://localhost/t...ganizacniJednotka
  • 14310
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