About: Feedback system to control reactive magnetron sputtering

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The process of reactive magnetron sputtering of titanium with oxygen inlet was studied. Thanks to feedback system Speedflo the process was able to stabilise itself in former unstable hysteresis region. The results of the experiments in hysteresis region let to improvements in theoretical model based on Berg’s model. The process of reactive magnetron sputtering of titanium with oxygen inlet was studied. Thanks to feedback system Speedflo the process was able to stabilise itself in former unstable hysteresis region. The results of the experiments in hysteresis region let to improvements in theoretical model based on Berg’s model. (en)
Title	Feedback system to control reactive magnetron sputtering Feedback system to control reactive magnetron sputtering (en)
skos:prefLabel	Feedback system to control reactive magnetron sputtering Feedback system to control reactive magnetron sputtering (en)
skos:notation	RIV/00216224:14310/12:00057675!RIV13-GA0-14310___
http://linked.open...avai/predkladatel	Přírodovědecká fakulta
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(ED2.1.00/03.0086), P(GAP205/12/0407), P(GD104/09/H080)
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Klein, Peter
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	136310
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/12:00057675
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	sputtering; magnetron; hysteresis (en)
http://linked.open.../riv/klicoveSlovo	sputtering magnetron hysteresis
http://linked.open...ontrolniKodProRIV	[A5BE5ACA977B]
http://linked.open...v/mistoKonaniAkce	Brno
http://linked.open...i/riv/mistoVydani	Brno
http://linked.open...i/riv/nazevZdroje	Potential and Applications of Surface Nanothreatment of Polymers and Glass
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	3 (xsd:int)
http://linked.open...vavai/riv/projekt	Plasmachemical processes and their technological applications Regional R&D center for low-cost plasma and nanotechnology surface modifications Understanding of Hybrid PVD-PECVD Process with Aim to Control Grow of Nanostructured Composite Coatings
http://linked.open...UplatneniVysledku	2012
http://linked.open...iv/tvurceVysledku	Vašina, Petr Schmidtová, Tereza Klein, Peter
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2012-01-01 (xsd:date)
number of pages	2 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Masaryk University
https://schema.org/isbn	9788021059795
http://localhost/t...ganizacniJednotka	14310
is http://linked.open...avai/riv/vysledek of	Feedback system to control reactive magnetron sputtering

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