About: Optimized calibration and measurement procedures in rotating analyzer and rotating polarizer ellipsometry

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Accurate spectroellipsometric (SE) measurements in the rotating analyzer (RAE) or rotating polarizer (RPE) configurations require accurate values of the polarizer/analyzer(/retarder) azimuths. Accurate spectroellipsometric (SE) measurements in the rotating analyzer (RAE) or rotating polarizer (RPE) configurations require accurate values of the polarizer/analyzer(/retarder) azimuths. While the readings are usually fairly accurate, true values are influenced by possible offsets between the plane of incidence, physical axes of the elements, and the instrument scales. The offsets are often determined by specialized calibration procedures. We describe SE measurements designed to obtain the calibration parameters together with the target ellipsometric spectra. We use multiple settings of the polarizer (analyzer) azimuths in RAE (RPE), respectively, to optimize precision and accuracy of SE measurements, and to economize measurement time. Accurate spectroellipsometric (SE) measurements in the rotating analyzer (RAE) or rotating polarizer (RPE) configurations require accurate values of the polarizer/analyzer(/retarder) azimuths. Accurate spectroellipsometric (SE) measurements in the rotating analyzer (RAE) or rotating polarizer (RPE) configurations require accurate values of the polarizer/analyzer(/retarder) azimuths. While the readings are usually fairly accurate, true values are influenced by possible offsets between the plane of incidence, physical axes of the elements, and the instrument scales. The offsets are often determined by specialized calibration procedures. We describe SE measurements designed to obtain the calibration parameters together with the target ellipsometric spectra. We use multiple settings of the polarizer (analyzer) azimuths in RAE (RPE), respectively, to optimize precision and accuracy of SE measurements, and to economize measurement time. (en)
Title	Optimized calibration and measurement procedures in rotating analyzer and rotating polarizer ellipsometry Optimized calibration and measurement procedures in rotating analyzer and rotating polarizer ellipsometry (en)
skos:prefLabel	Optimized calibration and measurement procedures in rotating analyzer and rotating polarizer ellipsometry Optimized calibration and measurement procedures in rotating analyzer and rotating polarizer ellipsometry (en)
skos:notation	RIV/00216224:14310/11:00051581!RIV12-MSM-14310___
http://linked.open...avai/predkladatel	Přírodovědecká fakulta
http://linked.open...avai/riv/aktivita	S Z
http://linked.open...avai/riv/aktivity	S, Z(MSM0021622410)
http://linked.open...iv/cisloPeriodika	9
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Münz, Filip Humlíček, Josef
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	218784
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/11:00051581
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	ellipsometry: spectroscopic; analyzer: rotating (en)
http://linked.open.../riv/klicoveSlovo	analyzer: rotating ellipsometry: spectroscopic
http://linked.open...odStatuVydavatele	CZ - Česká republika
http://linked.open...ontrolniKodProRIV	[A6D3DF0BB392]
http://linked.open...i/riv/nazevZdroje	Thin Solid Films
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	3 (xsd:int)
http://linked.open...UplatneniVysledku	2011
http://linked.open...v/svazekPeriodika	519
http://linked.open...iv/tvurceVysledku	Münz, Filip Maršík, Přemysl Humlíček, Josef
http://linked.open...ain/vavai/riv/wos	000289174200029
http://linked.open...n/vavai/riv/zamer	Physical and chemical properties of advanced materials and structures
issn	0040-6090
number of pages	4 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.tsf.2010.12.063
http://localhost/t...ganizacniJednotka	14310
is http://linked.open...avai/riv/vysledek of	Optimized calibration and measurement procedures in rotating analyzer and rotating polarizer ellipsometry Optimized calibration and measurement procedures in rotating analyzer and rotating polarizer ellipsometry

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