About: Variable-angle spectroscopic ellipsometry of considerably non-uniform thin films

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
rdfs:seeAlso	http://iopscience.iop.org/2040-8986/13/8/085705/
Description	A theoretical approach for including considerable thickness non-uniformity of thin films into the formulae employed within variable-angle spectroscopic ellipsometry is presented. It is based on a combination of the efficient formulae derived for the thickness distribution density corresponding to a wedge-shaped non-uniformity with dependences of the mean thickness and root mean square (rms) of thickness differences on the angle of incidence that take into account the real non-uniformity of the shape. These dependences are derived using momentum expansion of the thickness distribution density. The derived formulae are tested by means of numerical analysis. An application of this approach is illustrated using the optical characterization of a selected sample of non-uniform SiOxCyHz thin films using phase-modulated ellipsometry. A theoretical approach for including considerable thickness non-uniformity of thin films into the formulae employed within variable-angle spectroscopic ellipsometry is presented. It is based on a combination of the efficient formulae derived for the thickness distribution density corresponding to a wedge-shaped non-uniformity with dependences of the mean thickness and root mean square (rms) of thickness differences on the angle of incidence that take into account the real non-uniformity of the shape. These dependences are derived using momentum expansion of the thickness distribution density. The derived formulae are tested by means of numerical analysis. An application of this approach is illustrated using the optical characterization of a selected sample of non-uniform SiOxCyHz thin films using phase-modulated ellipsometry. (en)
Title	Variable-angle spectroscopic ellipsometry of considerably non-uniform thin films Variable-angle spectroscopic ellipsometry of considerably non-uniform thin films (en)
skos:prefLabel	Variable-angle spectroscopic ellipsometry of considerably non-uniform thin films Variable-angle spectroscopic ellipsometry of considerably non-uniform thin films (en)
skos:notation	RIV/00216224:14310/11:00050732!RIV12-MPO-14310___
http://linked.open...avai/predkladatel	Přírodovědecká fakulta
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(ED1.1.00/02.0068), P(FT-TA5/114), Z(MSM0021622411)
http://linked.open...iv/cisloPeriodika	8
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Ohlídal, Ivan Nečas, David Franta, Daniel
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	237941
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/11:00050732
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	ellipsometry; thin films; non-uniformity (en)
http://linked.open.../riv/klicoveSlovo	ellipsometry non-uniformity thin films
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[5F25EF6A4681]
http://linked.open...i/riv/nazevZdroje	Journal of Optics
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	3 (xsd:int)
http://linked.open...vavai/riv/projekt	Central european institute of technology Development of technology of PECVD films formation for automotive lighting equipment
http://linked.open...UplatneniVysledku	2011
http://linked.open...v/svazekPeriodika	13
http://linked.open...iv/tvurceVysledku	Franta, Daniel Nečas, David Ohlídal, Ivan
http://linked.open...ain/vavai/riv/wos	000294294500018
http://linked.open...n/vavai/riv/zamer	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
issn	2040-8978
number of pages	10 (xsd:int)
http://bibframe.org/vocab/doi	10.1088/2040-8978/13/8/085705
http://localhost/t...ganizacniJednotka	14310
is http://linked.open...avai/riv/vysledek of	Variable-angle spectroscopic ellipsometry of considerably non-uniform thin films Variable-angle spectroscopic ellipsometry of considerably non-uniform thin films

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