About: Comparative Study of RF Discharge in Neon by OES, Langmuir Probe, CR and PIC/MC Modelling

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	A novel method of determination of electron temperature and electron density in plasma based on optical emission spectroscopy and collisional-radiative modelling was compared with Langmuir probe measurement and PIC/MC simulation. An RF(13.56 MHz) capacitively-coupled discharge in neon at 10 Pa was investigated by intensity-calibrated optical emission spectroscopy. The intensities of neon transitions between 3s-3p states were fitted with CR model to determine the electron temperature and density. Metastable density measured in absorption was used in the calculations. A good agreement between electron temperature measured by OES+CR method and PIC/MC simulation was obtained close to driven electrode. The decrease of the electron temperature going into the bulk plasma, as expected from PIC/MC simulation, was not observed in experiment. Electron density determined from the fit of absolute intensities was found to be 5$\times$ larger than the result of Langmuir probe measurement. A novel method of determination of electron temperature and electron density in plasma based on optical emission spectroscopy and collisional-radiative modelling was compared with Langmuir probe measurement and PIC/MC simulation. An RF(13.56 MHz) capacitively-coupled discharge in neon at 10 Pa was investigated by intensity-calibrated optical emission spectroscopy. The intensities of neon transitions between 3s-3p states were fitted with CR model to determine the electron temperature and density. Metastable density measured in absorption was used in the calculations. A good agreement between electron temperature measured by OES+CR method and PIC/MC simulation was obtained close to driven electrode. The decrease of the electron temperature going into the bulk plasma, as expected from PIC/MC simulation, was not observed in experiment. Electron density determined from the fit of absolute intensities was found to be 5$\times$ larger than the result of Langmuir probe measurement. (en)
Title	Comparative Study of RF Discharge in Neon by OES, Langmuir Probe, CR and PIC/MC Modelling Comparative Study of RF Discharge in Neon by OES, Langmuir Probe, CR and PIC/MC Modelling (en)
skos:prefLabel	Comparative Study of RF Discharge in Neon by OES, Langmuir Probe, CR and PIC/MC Modelling Comparative Study of RF Discharge in Neon by OES, Langmuir Probe, CR and PIC/MC Modelling (en)
skos:notation	RIV/00216224:14310/10:00040642!RIV11-GA0-14310___
http://linked.open...avai/riv/aktivita	P S Z
http://linked.open...avai/riv/aktivity	P(GA202/09/0800), P(KAN101630651), S, Z(MSM0021622411)
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Navrátil, Zdeněk Dvořák, Pavel Trunec, David
http://linked.open.../riv/druhVysledku	O - Ostatní výsledky nezařaditelné do žádného z výše uvedených druhů výsledku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	251338
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/10:00040642
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	optical emission spectroscopy; collisional-radiative model; RF discharge; neon (en)
http://linked.open.../riv/klicoveSlovo	RF discharge neon optical emission spectroscopy collisional-radiative model
http://linked.open...ontrolniKodProRIV	[615CC6EE6105]
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Preparation of nano-films and nano-coatings on textiles using plasma surface treatment at atmospheric pressure Pulse mode and microwave plasma sources - research and applications
http://linked.open...UplatneniVysledku	2010
http://linked.open...iv/tvurceVysledku	Brzobohatý, Oto Dvořák, Pavel Navrátil, Zdeněk Trunec, David
http://linked.open...n/vavai/riv/zamer	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
http://localhost/t...ganizacniJednotka	14310

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