About: Pressure Effect on the Velocity and Flux Distributions of Sputtered Metal Species in Magnetron Discharge Measured by Space-Resolved Tunable Diode Laser Induced Fluorescence

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The pressure acts on the sputtered species resulting in their thermalization. Space-resolved velocity distributions of titanium atoms sputtered in a direct-current magnetron discharge were investigated using the tunable diode-laser induced fluorescence technique (TD-LIF). The titanium 3d24s2 - 3d2(3F)4s4p(1P0) transition centred at lambda_0 = 398.289 nm was used to excite neutral Ti atoms and to measure their velocity distribution profile through the TD-LIF signal measured at lambda_TD-LIF = 736.31 nm. Two groups of metallic particles, namely energetic and thermalized atoms, could be clearly distinguished and the corresponding flux distributions along the laser beam direction were deduced. The paper discusses the relative importance of the energetic atoms versus the discharge pressure especially in the vicinity of the target. The pressure acts on the sputtered species resulting in their thermalization. Space-resolved velocity distributions of titanium atoms sputtered in a direct-current magnetron discharge were investigated using the tunable diode-laser induced fluorescence technique (TD-LIF). The titanium 3d24s2 - 3d2(3F)4s4p(1P0) transition centred at lambda_0 = 398.289 nm was used to excite neutral Ti atoms and to measure their velocity distribution profile through the TD-LIF signal measured at lambda_TD-LIF = 736.31 nm. Two groups of metallic particles, namely energetic and thermalized atoms, could be clearly distinguished and the corresponding flux distributions along the laser beam direction were deduced. The paper discusses the relative importance of the energetic atoms versus the discharge pressure especially in the vicinity of the target. (en)
Title	Pressure Effect on the Velocity and Flux Distributions of Sputtered Metal Species in Magnetron Discharge Measured by Space-Resolved Tunable Diode Laser Induced Fluorescence Pressure Effect on the Velocity and Flux Distributions of Sputtered Metal Species in Magnetron Discharge Measured by Space-Resolved Tunable Diode Laser Induced Fluorescence (en)
skos:prefLabel	Pressure Effect on the Velocity and Flux Distributions of Sputtered Metal Species in Magnetron Discharge Measured by Space-Resolved Tunable Diode Laser Induced Fluorescence Pressure Effect on the Velocity and Flux Distributions of Sputtered Metal Species in Magnetron Discharge Measured by Space-Resolved Tunable Diode Laser Induced Fluorescence (en)
skos:notation	RIV/00216224:14310/09:00037850!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita	S
http://linked.open...avai/riv/aktivity	S
http://linked.open...iv/cisloPeriodika	Issue S1
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Schmidtová, Tereza
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	335796
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/09:00037850
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	anisotropy; laser-induced fluorescence (LIF); magnetron; sputtering (en)
http://linked.open.../riv/klicoveSlovo	sputtering anisotropy magnetron laser-induced fluorescence (LIF)
http://linked.open...odStatuVydavatele	DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV	[D59BC5BBB442]
http://linked.open...i/riv/nazevZdroje	Plasma Processes and Polymers
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...UplatneniVysledku	2009
http://linked.open...v/svazekPeriodika	6/2009
http://linked.open...iv/tvurceVysledku	Schmidtová, Tereza Boisse-Laporte, Caroline Bretagne, Jean de Poucques, Ludovic Minea, Tiberiu Popa, Gheorghe Vitelaru, Catalin
http://linked.open...ain/vavai/riv/wos	000272302900066
issn	1612-8850
number of pages	5 (xsd:int)
http://localhost/t...ganizacniJednotka	14310
is http://linked.open...avai/riv/vysledek of	Pressure Effect on the Velocity and Flux Distributions of Sputtered Metal Species in Magnetron Discharge Measured by Space-Resolved Tunable Diode Laser Induced Fluorescence Pressure Effect on the Velocity and Flux Distributions of Sputtered Metal Species in Magnetron Discharge Measured by Space-Resolved Tunable Diode Laser Induced Fluorescence Pressure Effect on the Velocity and Flux Distributions of Sputtered Metal Species in Magnetron Discharge Measured by Space-Resolved Tunable Diode Laser Induced Fluorescence Pressure Effect on the Velocity and Flux Distributions of Sputtered Metal Species in Magnetron Discharge Measured by Space-Resolved Tunable Diode Laser Induced Fluorescence

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