About: Analysis of vacancy and interstitial nucleation kinetics in Si wafers during rapid thermal annealing

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The kinetics of the vacancy and self interstitial processes in Si wafers are studied in this paper. Detailed insight into nucleation processes, out diffusion and vacancy interstitial recombination during the RTA leads to a new model of interaction between vacancies and oxygen. The kinetics of the vacancy and self interstitial processes in Si wafers are studied in this paper. Detailed insight into nucleation processes, out diffusion and vacancy interstitial recombination during the RTA leads to a new model of interaction between vacancies and oxygen. (en)
Title	Analysis of vacancy and interstitial nucleation kinetics in Si wafers during rapid thermal annealing Analysis of vacancy and interstitial nucleation kinetics in Si wafers during rapid thermal annealing (en)
skos:prefLabel	Analysis of vacancy and interstitial nucleation kinetics in Si wafers during rapid thermal annealing Analysis of vacancy and interstitial nucleation kinetics in Si wafers during rapid thermal annealing (en)
skos:notation	RIV/00216224:14310/09:00029731!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA202/09/1013), Z(MSM0021622410)
http://linked.open...iv/cisloPeriodika	10
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Caha, Ondřej Meduňa, Mojmír Kuběna, Josef Kuběna, Alan
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	302975
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/09:00029731
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Silicon; vacancies; Interstitials; nucleation (en)
http://linked.open.../riv/klicoveSlovo	Silicon vacancies nucleation Interstitials
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[C2FED3092FC5]
http://linked.open...i/riv/nazevZdroje	J.Phys.: Condens. Matter
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Nucleation and growth of oxygen precipitates in silicon
http://linked.open...UplatneniVysledku	2009
http://linked.open...v/svazekPeriodika	21
http://linked.open...iv/tvurceVysledku	Caha, Ondřej Kuběna, Alan Kuběna, Josef Meduňa, Mojmír
http://linked.open...ain/vavai/riv/wos	000263493500026
http://linked.open...n/vavai/riv/zamer	Physical and chemical properties of advanced materials and structures
issn	0953-8984
number of pages	11 (xsd:int)
http://localhost/t...ganizacniJednotka	14310
is http://linked.open...avai/riv/vysledek of	Analysis of vacancy and interstitial nucleation kinetics in Si wafers during rapid thermal annealing Analysis of vacancy and interstitial nucleation kinetics in Si wafers during rapid thermal annealing Analysis of vacancy and interstitial nucleation kinetics in Si wafers during rapid thermal annealing Analysis of vacancy and interstitial nucleation kinetics in Si wafers during rapid thermal annealing

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