About: Multiplate misalignment artifacts in rotating-complensator ellipsometry: Analysis and data treatment     Goto   Sponge   NotDistinct   Permalink

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Description
  • Rotating compensator ellipsometry using multi-plate retarders can suffer from various artifacts. Our measurements in the range from 1.4 to 6.2 eV revealed spurious oscillations in ellipsometric parameters. We assign these oscillations to the angular misalignment between the individual plates of the retarder. A simple model using Mueller matrix framework is constructed to describe the observed effects and to elucidate the origin of the artifacts. The model is used to predict the impact of the artifacts on the results of signal analysis, and a calibration procedure is presented. Finally, the knowledge of the origin of the artifacts has been successfully used to reduce substantially the spurious oscillations in measured data.
  • Rotating compensator ellipsometry using multi-plate retarders can suffer from various artifacts. Our measurements in the range from 1.4 to 6.2 eV revealed spurious oscillations in ellipsometric parameters. We assign these oscillations to the angular misalignment between the individual plates of the retarder. A simple model using Mueller matrix framework is constructed to describe the observed effects and to elucidate the origin of the artifacts. The model is used to predict the impact of the artifacts on the results of signal analysis, and a calibration procedure is presented. Finally, the knowledge of the origin of the artifacts has been successfully used to reduce substantially the spurious oscillations in measured data. (en)
Title
  • Multiplate misalignment artifacts in rotating-complensator ellipsometry: Analysis and data treatment
  • Multiplate misalignment artifacts in rotating-complensator ellipsometry: Analysis and data treatment (en)
skos:prefLabel
  • Multiplate misalignment artifacts in rotating-complensator ellipsometry: Analysis and data treatment
  • Multiplate misalignment artifacts in rotating-complensator ellipsometry: Analysis and data treatment (en)
skos:notation
  • RIV/00216224:14310/08:00026013!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM0021622410)
http://linked.open...iv/cisloPeriodika
  • 5
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 381178
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14310/08:00026013
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • ellipsometry; rotating compensator (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • CZ - Česká republika
http://linked.open...ontrolniKodProRIV
  • [714B80316D5D]
http://linked.open...i/riv/nazevZdroje
  • physica status solidi (c)
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 5
http://linked.open...iv/tvurceVysledku
  • Maršík, Přemysl
  • Humlíček, Josef
http://linked.open...ain/vavai/riv/wos
  • 000256862500015
http://linked.open...n/vavai/riv/zamer
issn
  • 1610-1634
number of pages
http://localhost/t...ganizacniJednotka
  • 14310
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