About: In-situ spectroscopic ellipsometry: optimization of monitoring and closed-loop-control procedures     Goto   Sponge   NotDistinct   Permalink

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Description
  • We discuss optimized extraction of information contained in a series of complex reflectance ratios in a series of consecutive, in-situ SE measurements during the growth of thin films. We present a general computational scheme and discuss guidelines for the optimum data treatment. As an example, we analyze several hundreds of spectra recorded during the growth of diamond-like carbon on TiCN/steel substrate.
  • We discuss optimized extraction of information contained in a series of complex reflectance ratios in a series of consecutive, in-situ SE measurements during the growth of thin films. We present a general computational scheme and discuss guidelines for the optimum data treatment. As an example, we analyze several hundreds of spectra recorded during the growth of diamond-like carbon on TiCN/steel substrate. (en)
Title
  • In-situ spectroscopic ellipsometry: optimization of monitoring and closed-loop-control procedures
  • In-situ spectroscopic ellipsometry: optimization of monitoring and closed-loop-control procedures (en)
skos:prefLabel
  • In-situ spectroscopic ellipsometry: optimization of monitoring and closed-loop-control procedures
  • In-situ spectroscopic ellipsometry: optimization of monitoring and closed-loop-control procedures (en)
skos:notation
  • RIV/00216224:14310/08:00025835!RIV11-MSM-14310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM0021622410)
http://linked.open...iv/cisloPeriodika
  • 4
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 372603
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14310/08:00025835
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • in situ ellipsometry; monitoring; closed loop control (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV
  • [FDB9DA73187E]
http://linked.open...i/riv/nazevZdroje
  • physica status solidi (a), Applied research
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 205
http://linked.open...iv/tvurceVysledku
  • Humlíček, Josef
http://linked.open...ain/vavai/riv/wos
  • 000255702600018
http://linked.open...n/vavai/riv/zamer
issn
  • 1862-6300
number of pages
http://localhost/t...ganizacniJednotka
  • 14310
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